Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7455893 | Staggered in-situ deposition and etching of a dielectric layer for HDP-CVD | — | 2008-11-25 |
| 7294205 | Method for reducing the intrinsic stress of high density plasma films | K. V. Ravi, Turgut Sahin, Pravin K. Narwankar | 2007-11-13 |
| 7159597 | Multistep remote plasma clean process | Zhong Qiang Hua, Zhengquan Tan, Zhuang Li | 2007-01-09 |
| 7132134 | Staggered in-situ deposition and etching of a dielectric layer for HDP CVD | — | 2006-11-07 |
| 6846742 | Si seasoning to reduce particles, extend clean frequency, block mobile ions and increase chamber throughput | — | 2005-01-25 |
| 6843858 | Method of cleaning a semiconductor processing chamber | — | 2005-01-18 |
| 6821577 | Staggered in-situ deposition and etching of a dielectric layer for HDP CVD | — | 2004-11-23 |
| 6704913 | In situ wafer heat for reduced backside contamination | — | 2004-03-09 |
| 6696362 | Method for using an in situ particle sensor for monitoring particle performance in plasma deposition processes | Leonard J. Olmer, Phillip D. Nguyen | 2004-02-24 |
| 6589868 | Si seasoning to reduce particles, extend clean frequency, block mobile ions and increase chamber throughput | — | 2003-07-08 |
| 6559052 | Deposition of amorphous silicon films by high density plasma HDP-CVD at low temperatures | Zhuang Li, Tzuyuan Yiin | 2003-05-06 |
| 6559026 | Trench fill with HDP-CVD process including coupled high power density plasma deposition | Zhuang Li, Young Kwang Lee | 2003-05-06 |
| 6527910 | Staggered in-situ deposition and etching of a dielectric layer for HDP-CVD | — | 2003-03-04 |
| 6524969 | High density plasma chemical vapor deposition (HDP-CVD) processing of gallium arsenide wafers | Zhuang Li, Tzuyuan Yiin, Lung-Tien Han | 2003-02-25 |
| 6514870 | In situ wafer heat for reduced backside contamination | — | 2003-02-04 |
| 6458722 | Controlled method of silicon-rich oxide deposition using HDP-CVD | Bikram Kapoor | 2002-10-01 |
| 6194038 | Method for deposition of a conformal layer on a substrate | — | 2001-02-27 |
| 6121161 | Reduction of mobile ion and metal contamination in HDP-CVD chambers using chamber seasoning film depositions | Turgut Sahin, Hichem M'Saad, Romuald Nowak | 2000-09-19 |
| 6077357 | Orientless wafer processing on an electrostatic chuck | Shijian Li, Brian Lue | 2000-06-20 |
| 5976993 | Method for reducing the intrinsic stress of high density plasma films | K. V. Ravi, Turgut Sahin, Pravin K. Narwankar | 1999-11-02 |
| 5811356 | Reduction in mobile ion and metal contamination by varying season time and bias RF power during chamber cleaning | Laxman Murugesh, Pravin K. Narwankar, Turgut Sahin | 1998-09-22 |
| 5748434 | Shield for an electrostatic chuck | Brian Lue, Fred C. Redeker | 1998-05-05 |