Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7294205 | Method for reducing the intrinsic stress of high density plasma films | Kent Rossman, Turgut Sahin, Pravin K. Narwankar | 2007-11-13 |
| 5976993 | Method for reducing the intrinsic stress of high density plasma films | Kent Rossman, Turgut Sahin, Pravin K. Narwankar | 1999-11-02 |