Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11007618 | Printing chemical mechanical polishing pad having window or controlled porosity | Kadthala Ramaya Narendmath | 2021-05-18 |
| 9993907 | Printed chemical mechanical polishing pad having printed window | Kadthala Ramaya Narendrnath | 2018-06-12 |
| 9481608 | Surface annealing of components for substrate processing chambers | Ashish Bhatnagar, Padma Gopalakrishnan | 2016-11-01 |
| 8617672 | Localized surface annealing of components for substrate processing chambers | Ashish Bhatnagar, Padma Gopalakrishnan | 2013-12-31 |
| 7732056 | Corrosion-resistant aluminum component having multi-layer coating | Ashish Bhatnagar | 2010-06-08 |
| 7431772 | Gas distributor having directed gas flow and cleaning method | Padmanabhan Krishnaraj, Carl A. Dunham | 2008-10-07 |
| 7135426 | Erosion resistant process chamber components | Stan Detmar, Ho Fang | 2006-11-14 |
| 6878214 | Process endpoint detection in processing chambers | Gary R. Ahr | 2005-04-12 |
| 6579811 | Method and apparatus for modifying the profile of narrow, high-aspect-ratio gaps through wafer heating | Pravin K. Narwankar, Sameer Desai, Walter Zygmunt, Turgut Sahin | 2003-06-17 |
| 6450117 | Directing a flow of gas in a substrate processing chamber | Padmanaban Krishnaraj, Michael S. Cox, Canfeng Lai, Narendra Dubey, Tom K. Cho +2 more | 2002-09-17 |
| 6375744 | Sequential in-situ heating and deposition of halogen-doped silicon oxide | Maciek Orczyk, Pravin Narawankar, Jianmin Qiao, Turgut Sahin | 2002-04-23 |
| 6228781 | Sequential in-situ heating and deposition of halogen-doped silicon oxide | Maciek Orczyk, Pravin Narawankar, Jianmin Qiao, Turgut Sahin | 2001-05-08 |
| 6217658 | Sequencing of the recipe steps for the optimal low-dielectric constant HDP-CVD Processing | Maciek Orczyk, Pravin K. Narwankar | 2001-04-17 |
| 6200911 | Method and apparatus for modifying the profile of narrow, high-aspect-ratio gaps using differential plasma power | Pravin K. Narwankar, Sameer Desai, Walter Zygmunt, Turgut Sahin | 2001-03-13 |
| 6159333 | Substrate processing system configurable for deposition or cleaning | Anand Gupta, Srihari Ponnekanti, Gana A. Rimple | 2000-12-12 |
| 6136685 | High deposition rate recipe for low dielectric constant films | Pravin K. Narwankar, Turgut Sahin, Maciek Orczyk, Jianmin Qiao | 2000-10-24 |
| 5997685 | Corrosion-resistant apparatus | Charles K. Radhamohan, Srihari Ponnekanti | 1999-12-07 |
| 5994662 | Unique baffle to deflect remote plasma clean gases | — | 1999-11-30 |
| 5937323 | Sequencing of the recipe steps for the optimal low-k HDP-CVD processing | Maciek Orczyk, Pravin K. Narwankar | 1999-08-10 |
| 5810937 | Using ceramic wafer to protect susceptor during cleaning of a processing chamber | Anand Gupta, Srihari Ponnekanti, Gana A. Rimple | 1998-09-22 |
| 5811195 | Corrosion-resistant aluminum article for semiconductor processing equipment | Craig Bercaw, Joshua E. Byrne | 1998-09-22 |
| 5811356 | Reduction in mobile ion and metal contamination by varying season time and bias RF power during chamber cleaning | Pravin K. Narwankar, Turgut Sahin, Kent Rossman | 1998-09-22 |
| 5756222 | Corrosion-resistant aluminum article for semiconductor processing equipment | Craig Bercaw, Joshua E. Byrne | 1998-05-26 |