Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7867905 | System and method for semiconductor processing | Tue Nguyen, Tai Dung Nguyen | 2011-01-11 |
| 7442615 | Semiconductor processing system and method | Tue Nguyen, Tai Dung Nguyen | 2008-10-28 |
| 7153542 | Assembly line processing method | Tue Nguyen, Tai Dung Nguyen | 2006-12-26 |
| 7074278 | Removable lid and floating pivot | Tue Nguyen | 2006-07-11 |
| 7049549 | Multi-thermal zone shielding apparatus | Tue Nguyen | 2006-05-23 |
| 6921555 | Method and system for sequential processing in a two-compartment chamber | Tue Nguyen, Tai Dung Nguyen | 2005-07-26 |
| 6858085 | Two-compartment chamber for sequential processing | Tue Nguyen, Tai Dung Nguyen | 2005-02-22 |
| 6844527 | Multi-thermal zone shielding apparatus | Tue Nguyen | 2005-01-18 |
| 6800254 | Visual indicator cold trapping system | Tue Nguyen | 2004-10-05 |
| 6609632 | Removable lid and floating pivot | Tue Nguyen | 2003-08-26 |
| 6610169 | Semiconductor processing system and method | Tue Nguyen, Tai Dung Nguyen | 2003-08-26 |
| 6572706 | Integrated precursor delivery system | Tue Nguyen | 2003-06-03 |
| 6449844 | Heat exchanger apparatus for a semiconductor wafer support and method of fabricating same | Thomas M. Duddy, Robin M. Ellis | 2002-09-17 |
| 6242111 | Anodized aluminum susceptor for forming integrated circuit structures and method of making anodized aluminum susceptor | Susan G. Telford | 2001-06-05 |
| 6221166 | Multi-thermal zone shielding apparatus | Tue Nguyen | 2001-04-24 |
| 6180926 | Heat exchanger apparatus for a semiconductor wafer support and method of fabricating same | Thomas M. Duddy, Robin M. Ellis | 2001-01-30 |
| 6123097 | Apparatus and methods for controlling process chamber pressure | Quoc Truong, Imad Yousif, Vincente Lim | 2000-09-26 |
| 5959409 | Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method protecting such heated metal surfaces | Charles Dornfest, John M. White, Hiroyuki Steven Tomosawa, Mark Fodor | 1999-09-28 |
| 5811195 | Corrosion-resistant aluminum article for semiconductor processing equipment | Laxman Murugesh, Joshua E. Byrne | 1998-09-22 |
| 5756222 | Corrosion-resistant aluminum article for semiconductor processing equipment | Laxman Murugesh, Joshua E. Byrne | 1998-05-26 |
| 5705225 | Method of filling pores in anodized aluminum parts | Charles Dornfest, Fred C. Redeker, Mark Fodor, H. Steven Tomozawa | 1998-01-06 |
| 5680013 | Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces | Charles Dornfest, John M. White, Hiroyuki Steven Tomosawa, Mark Fodor | 1997-10-21 |
| 5531835 | Patterned susceptor to reduce electrostatic force in a CVD chamber | Mark Fodor, Charles Dornfest | 1996-07-02 |
| 5496142 | Slotted conical spring washer | Mark Fodor, Charles Dornfest | 1996-03-05 |
| 5192610 | Corrosion-resistant protective coating on aluminum substrate and method of forming same | D'Arcy H. Lorimer | 1993-03-09 |