Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6449844 | Heat exchanger apparatus for a semiconductor wafer support and method of fabricating same | Robin M. Ellis, Craig Bercaw | 2002-09-17 |
| 6180926 | Heat exchanger apparatus for a semiconductor wafer support and method of fabricating same | Robin M. Ellis, Craig Bercaw | 2001-01-30 |