Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6449844 | Heat exchanger apparatus for a semiconductor wafer support and method of fabricating same | Thomas M. Duddy, Craig Bercaw | 2002-09-17 |
| 6180926 | Heat exchanger apparatus for a semiconductor wafer support and method of fabricating same | Thomas M. Duddy, Craig Bercaw | 2001-01-30 |