Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946399 | Cleaning system method and apparatus for the manufacture of integrated cicuits | — | 2005-09-20 |
| 6589878 | Method of cleaning a wafer in an IC fabrication | — | 2003-07-08 |
| 6524934 | Method of manufacture for generation of high purity water vapor | — | 2003-02-25 |
| 6508258 | Method and apparatus for cleaning flat workpieces within a semiconductor manufacturing system | — | 2003-01-21 |
| 6460552 | Method and apparatus for cleaning flat workpieces | — | 2002-10-08 |
| 6398846 | Semiconductor manufacturing system with getter safety device | Charles H. Applegarth | 2002-06-04 |
| 6232204 | Semiconductor manufacturing system with getter safety device | Charles H. Applegarth | 2001-05-15 |
| 6168645 | Safety system for gas purifier | Marco Succi, Giorgio Vergani | 2001-01-02 |
| 6165328 | Method for processing wafers with in situ gettering | Gordon P. Krueger | 2000-12-26 |
| 6156105 | Semiconductor manufacturing system with getter safety device | Charles H. Applegarth | 2000-12-05 |
| 6142742 | Getter pump module and system | Gordon P. Krueger, Sergio Carella, Andrea Conte | 2000-11-07 |
| 6109880 | Getter pump module and system including focus shields | Gordon P. Krueger, Sergio Carella, Andrea Conte | 2000-08-29 |
| 6068685 | Semiconductor manufacturing system with getter safety device | Charles H. Applegarth | 2000-05-30 |
| 6043137 | Getter pump module and system | Gordon P. Krueger, Sergio Carella, Andrea Conte | 2000-03-28 |
| 5997255 | Method for pumping a chamber using an in situ getter pump | Gordon P. Krueger, Sergio Carella, Andrea Conte | 1999-12-07 |
| 5993165 | In Situ getter pump system and method | Gordon P. Krueger | 1999-11-30 |
| 5980213 | Getter pump module and system | Gordon P. Krueger, Sergio Carella, Andrea Conte | 1999-11-09 |
| 5972183 | Getter pump module and system | Gordon P. Krueger, Sergio Carella, Andrea Conte | 1999-10-26 |
| 5911560 | Getter pump module and system | Gordon P. Krueger, Sergio Carella, Andrea Conte | 1999-06-15 |
| 5895519 | Method and apparatus for purifying hydrogen gas | — | 1999-04-20 |
| 5879134 | In situ getter pump system and method | Gordon P. Krueger | 1999-03-09 |
| 5855118 | Combination cryopump/getter pump and method for regenerating same | — | 1999-01-05 |
| RE35725 | Method and apparatus for removing residual hydrogen from a purified gas | Jeffrey L. Briesacher, Charles H. Applegarth | 1998-02-10 |
| 5685963 | In situ getter pump system and method | Gordon P. Krueger | 1997-11-11 |
| 5558844 | Process for the purification of hydrogen | Marco Succi | 1996-09-24 |