Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5959409 | Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method protecting such heated metal surfaces | Charles Dornfest, John M. White, Craig Bercaw, Mark Fodor | 1999-09-28 |
| 5680013 | Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces | Charles Dornfest, John M. White, Craig Bercaw, Mark Fodor | 1997-10-21 |