Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421601 | Rotary reactor for uniform particle coating with thin films | Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel +2 more | 2025-09-23 |
| 12394604 | Plasma source with floating electrodes | Dmitry A. Dzilno, Robert B. Moore | 2025-08-19 |
| 12220678 | Paddle configuration for a particle coating reactor | Govindraj Desai, Sekar Krishnasamy, Sumedh Acharya, Dakshalkumar Patel, Jonathan Frankel +2 more | 2025-02-11 |
| 12134091 | Reactor for coating particles in stationary chamber with rotating paddles | Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar, Govindraj Desai, Sekar Krishnasamy | 2024-11-05 |
| 12077856 | Reactor for coating particles in stationary chamber with rotating paddles and gas injection | Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar, Govindraj Desai, Sekar Krishnasamy +1 more | 2024-09-03 |
| 12071685 | Gas injection for de-agglomeration in particle coating reactor | Jonathan Frankel, Sekar Krishnasamy, Govindraj Desai, Sandip S. Desai | 2024-08-27 |
| 11717800 | Reactor for coating particles in stationary chamber with rotating paddles | Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar, Govindraj Desai, Sekar Krishnasamy | 2023-08-08 |
| 11692265 | Gas injection for de-agglomeration in particle coating reactor | Jonathan Frankel, Sekar Krishnasamy, Govindraj Desai, Sandip S. Desai | 2023-07-04 |
| 11674223 | Reactor for coating particles in stationary chamber with rotating paddles and gas injection | Jonathan Frankel, Colin C. Neikirk, Pravin K. Narwankar, Govindraj Desai, Sekar Krishnasamy +1 more | 2023-06-13 |
| 11299806 | Gas injection for de-agglomeration in particle coating reactor | Jonathan Frankel, Sekar Krishnasamy, Govindraj Desai, Sandip S. Desai | 2022-04-12 |
| 11180851 | Rotary reactor for uniform particle coating with thin films | Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel +2 more | 2021-11-23 |
| 11174552 | Rotary reactor for uniform particle coating with thin films | Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel +2 more | 2021-11-16 |
| 11041253 | Silicon wafers by epitaxial deposition | Visweswaren Sivaramakrishnan, Tirunelveli S. Ravi, Andrzej Kaszuba, Jean R. Vatus | 2021-06-22 |
| 10961621 | CVD reactor chamber with resistive heating and substrate holder | Visweswaren Sivaramakrishnan, Tirunelveli S. Ravi, Timothy N. Kleiner | 2021-03-30 |
| 9982363 | Silicon wafers by epitaxial deposition | Visweswaren Sivaramakrishnan, Tirunelveli S. Ravi, Andrzej Kaszuba, Jean R. Vatus | 2018-05-29 |
| 9920451 | High throughput multi-wafer epitaxial reactor | Visweswaren Sivaramakrishnan, Kedarnath Sangam, Tirunelveli S. Ravi, Andrzej Kaszuba | 2018-03-20 |
| 9556522 | High throughput multi-wafer epitaxial reactor | Visweswaren Sivaramakrishnan, Kedarnath Sangam, Tirunelveli S. Ravi, Andrzej Kaszuba | 2017-01-31 |
| 9255346 | Silicon wafers by epitaxial deposition | Visweswaren Sivaramakrishnan, Tirunelveli S. Ravi, Andrzej Kaszuba, Jean R. Vatus | 2016-02-09 |
| 8673081 | High throughput multi-wafer epitaxial reactor | Visweswaren Sivaramakrishnan, Kedarnath Sangam, Tirunelveli S. Ravi, Andrzej Kaszuba | 2014-03-18 |
| 8298629 | High throughput multi-wafer epitaxial reactor | Visweswaren Sivaramakrishnan, Kedarnath Sangam, Tirunelveli S. Ravi, Andrzej Kaszuba | 2012-10-30 |
| 6162285 | Ozone enhancement unit | Gary Fong | 2000-12-19 |
| 6123097 | Apparatus and methods for controlling process chamber pressure | Imad Yousif, Vincente Lim, Craig Bercaw | 2000-09-26 |
| 5904170 | Pressure flow and concentration control of oxygen/ozone gas mixtures | Keith Harvey, Irwin Silvestre | 1999-05-18 |
| 5902404 | Resonant chamber applicator for remote plasma source | Gary Fong, Irwin Silvestre | 1999-05-11 |
| 5882414 | Method and apparatus for self-cleaning a blocker plate | Gary Fong, Visweswaren Sivaramakrishman | 1999-03-16 |