Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5935334 | Substrate processing apparatus with bottom-mounted remote plasma system | Gary Fong | 1999-08-10 |
| 5904170 | Pressure flow and concentration control of oxygen/ozone gas mixtures | Keith Harvey, Quoc Truong | 1999-05-18 |
| 5902404 | Resonant chamber applicator for remote plasma source | Gary Fong, Quoc Truong | 1999-05-11 |