Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7037376 | Backflush chamber clean | Karthik Janakiraman, Kirby H. Floyd | 2006-05-02 |
| 6614181 | UV radiation source for densification of CVD carbon-doped silicon oxide films | Tian-Hoe Lim, Li-Qun Xia | 2003-09-02 |
| 6566278 | Method for densification of CVD carbon-doped silicon oxide films through UV irradiation | Tian-Hoe Lim, Li-Qun Xia | 2003-05-20 |
| 5904170 | Pressure flow and concentration control of oxygen/ozone gas mixtures | Quoc Truong, Irwin Silvestre | 1999-05-18 |