Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9039816 | Dynamic control of desiccant concentrations in a water recovery device | Charles Becze, James Ball, David Blatt, Michael J. Flynn, Kean Wing Kin Lam +1 more | 2015-05-26 |
| 9005349 | Configurable manifolds for water recovery device | James Ball, Charles Becze, Michael J. Flynn, Richard Teltz, Kean Wing Kin Lam | 2015-04-14 |
| 8864883 | Surface treatments for dessicant media in a water recovery device | Charles Becze, James Ball, David Blatt, Michael J. Flynn, Kean Wing Kin Lam +1 more | 2014-10-21 |
| 6663713 | Method and apparatus for forming a thin polymer layer on an integrated circuit structure | Stuardo Robles, Visweswaren Sivaramakrishnan, Bang Nguyen, Gayathri Rao, Vicente Lam +2 more | 2003-12-16 |
| 6347636 | Methods and apparatus for gettering fluorine from chamber material surfaces | Li-Qun Xia, Visweswaren Sivaramakrishnan, Srinivas D. Nemani, Ellie Yieh | 2002-02-19 |
| 6162285 | Ozone enhancement unit | Quoc Truong | 2000-12-19 |
| 5958510 | Method and apparatus for forming a thin polymer layer on an integrated circuit structure | Visweswaren Sivaramakrishnam, Bang Nguyen, Gayathri Rao, Stuardo Robles, Vicente Lim +1 more | 1999-09-28 |
| 5939831 | Methods and apparatus for pre-stabilized plasma generation for microwave clean applications | Fong Chang, Long Nguyen | 1999-08-17 |
| 5935334 | Substrate processing apparatus with bottom-mounted remote plasma system | Irwin Silvestre | 1999-08-10 |
| 5935340 | Method and apparatus for gettering fluorine from chamber material surfaces | Li-Qun Xia, Visweswaren Sivaramakrishnan, Srinivas D. Nemani, Ellie Yieh | 1999-08-10 |
| 5902404 | Resonant chamber applicator for remote plasma source | Irwin Silvestre, Quoc Truong | 1999-05-11 |
| 5882414 | Method and apparatus for self-cleaning a blocker plate | Quoc Truong, Visweswaren Sivaramakrishman | 1999-03-16 |
| 5879574 | Systems and methods for detecting end of chamber clean in a thermal (non-plasma) process | Visweswaren Sivaramakrishnan | 1999-03-09 |
| 5812403 | Methods and apparatus for cleaning surfaces in a substrate processing system | Li-Qun Xia, Srinivas D. Nemani, Ellie Yieh | 1998-09-22 |
| 5725675 | Silicon carbide constant voltage gradient gas feedthrough | Vincente Lim, Visweswaren Sivaramakrishnan | 1998-03-10 |