Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663713 | Method and apparatus for forming a thin polymer layer on an integrated circuit structure | Visweswaren Sivaramakrishnan, Bang Nguyen, Gayathri Rao, Gary Fong, Vicente Lam +2 more | 2003-12-16 |
| 6374770 | Apparatus for improving film stability of halogen-doped silicon oxide films | Peter Wai-Man Lee, Anand Gupta, Virendra V. Rana, Amrita Verma | 2002-04-23 |
| 6277347 | Use of ozone in process effluent abatement | Ranald Stearns, Gary Sypherd, Maria Galiano | 2001-08-21 |
| 6121164 | Method for forming low compressive stress fluorinated ozone/TEOS oxide film | Ellie Yieh, Xin Zhang, Bang Nguyen, Peter Wai-Man Lee | 2000-09-19 |
| 6103601 | Method and apparatus for improving film stability of halogen-doped silicon oxide films | Peter Wai-Man Lee, Anand Gupta, Virendra V. Rana, Amrita Verma | 2000-08-15 |
| 6047713 | Method for cleaning a throttle valve | Thanh Pham, Bang Nguyen | 2000-04-11 |
| 6035803 | Method and apparatus for controlling the deposition of a fluorinated carbon film | Wai-Fan Yau, Ping Xu, Kaushal K. Singh | 2000-03-14 |
| 6009827 | Apparatus for creating strong interface between in-situ SACVD and PECVD silicon oxide films | Visweswaren Sivaramakrishnan, Maria Galiano, Victoria Kithcart | 2000-01-04 |
| 5958510 | Method and apparatus for forming a thin polymer layer on an integrated circuit structure | Visweswaren Sivaramakrishnam, Bang Nguyen, Gayathri Rao, Gary Fong, Vicente Lim +1 more | 1999-09-28 |
| 5814377 | Method and apparatus for creating strong interface between in-situ SACVD and PECVD silicon oxide films | Visweswaren Sivaramakrishnan, Maria Galiano, Victoria Kithcart | 1998-09-29 |
| 5804259 | Method and apparatus for depositing a multilayered low dielectric constant film | — | 1998-09-08 |
| 5707451 | Method and apparatus for cleaning a throttle valve | Thanh Pham, Bang Nguyen | 1998-01-13 |
| 5648175 | Chemical vapor deposition reactor system and integrated circuit | Kathleen S. Russell, Bang Nguyen, Visweswaren Sivaramakrishnan | 1997-07-15 |