| 6663713 |
Method and apparatus for forming a thin polymer layer on an integrated circuit structure |
Visweswaren Sivaramakrishnan, Bang Nguyen, Gayathri Rao, Gary Fong, Vicente Lam +2 more |
2003-12-16 |
| 6374770 |
Apparatus for improving film stability of halogen-doped silicon oxide films |
Peter Wai-Man Lee, Anand Gupta, Virendra V. Rana, Amrita Verma |
2002-04-23 |
| 6277347 |
Use of ozone in process effluent abatement |
Ranald Stearns, Gary Sypherd, Maria Galiano |
2001-08-21 |
| 6121164 |
Method for forming low compressive stress fluorinated ozone/TEOS oxide film |
Ellie Yieh, Xin Zhang, Bang Nguyen, Peter Wai-Man Lee |
2000-09-19 |
| 6103601 |
Method and apparatus for improving film stability of halogen-doped silicon oxide films |
Peter Wai-Man Lee, Anand Gupta, Virendra V. Rana, Amrita Verma |
2000-08-15 |
| 6047713 |
Method for cleaning a throttle valve |
Thanh Pham, Bang Nguyen |
2000-04-11 |
| 6035803 |
Method and apparatus for controlling the deposition of a fluorinated carbon film |
Wai-Fan Yau, Ping Xu, Kaushal K. Singh |
2000-03-14 |
| 6009827 |
Apparatus for creating strong interface between in-situ SACVD and PECVD silicon oxide films |
Visweswaren Sivaramakrishnan, Maria Galiano, Victoria Kithcart |
2000-01-04 |
| 5958510 |
Method and apparatus for forming a thin polymer layer on an integrated circuit structure |
Visweswaren Sivaramakrishnam, Bang Nguyen, Gayathri Rao, Gary Fong, Vicente Lim +1 more |
1999-09-28 |
| 5814377 |
Method and apparatus for creating strong interface between in-situ SACVD and PECVD silicon oxide films |
Visweswaren Sivaramakrishnan, Maria Galiano, Victoria Kithcart |
1998-09-29 |
| 5804259 |
Method and apparatus for depositing a multilayered low dielectric constant film |
— |
1998-09-08 |
| 5707451 |
Method and apparatus for cleaning a throttle valve |
Thanh Pham, Bang Nguyen |
1998-01-13 |
| 5648175 |
Chemical vapor deposition reactor system and integrated circuit |
Kathleen S. Russell, Bang Nguyen, Visweswaren Sivaramakrishnan |
1997-07-15 |
