Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10424687 | Methods of producing uniform intrinsic layer | Joe Feng | 2019-09-24 |
| 10205038 | Photovoltaic devices including curved sub-layers | Joe Feng | 2019-02-12 |
| 9972743 | Methods of producing photoelectric devices | Joe Feng | 2018-05-15 |
| 7799698 | Deposition-selective etch-deposition process for dielectric film gapfill | Lin Zhang, Xiaolin Chen, Dongqing Li, Farhad Moghadam, Zhuang Li +1 more | 2010-09-21 |
| 7691753 | Deposition-selective etch-deposition process for dielectric film gapfill | Lin Zhang, Xiaolin Chen, Dongqing Li, Farhad Moghadam, Zhuang Li +1 more | 2010-04-06 |
| 7498268 | Gas delivery system for semiconductor processing | Sudhir Gondhalekar, Padmanabhan Krishnaraj, Tom K. Cho, Muhammad M. Rasheed, Hemant P. Mungekar +1 more | 2009-03-03 |
| 7479304 | Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate | Jennifer Y. Sun, Senh Thach, James Dempster, Li Xu | 2009-01-20 |
| 7399388 | Sequential gas flow oxide deposition technique | Farhad Moghadam, Michael S. Cox, Padmanabhan Krishnaraj | 2008-07-15 |
| 7294588 | In-situ-etch-assisted HDP deposition | M. Ziaul Karim, Dongqing Li, Jeong Soo Byun | 2007-11-13 |
| 7141138 | Gas delivery system for semiconductor processing | Sudhir Gondhalekar, Padmanabhan Krishnaraj, Tom K. Cho, Muhammad M. Rasheed, Hemant P. Mungekar +1 more | 2006-11-28 |
| 7097886 | Deposition process for high aspect ratio trenches | Farhad Moghadam, Michael S. Cox, Padmanabhan Krishnaraj, Zhenjiang Cui | 2006-08-29 |
| 7081414 | Deposition-selective etch-deposition process for dielectric film gapfill | Lin Zhang, Xiaolin Chen, Dongqing Li, Farhad Moghadam, Zhuang Li +1 more | 2006-07-25 |
| 7049211 | In-situ-etch-assisted HDP deposition using SiF4 | M. Ziaul Karim, Dongqing Li, Jeong Soo Byun | 2006-05-23 |
| 7033945 | Gap filling with a composite layer | Jeong Soo Byun, Zheng Yuan, Shankar Venkataraman, M. Ziaul Karim, Ellie Yieh | 2006-04-25 |
| 6903031 | In-situ-etch-assisted HDP deposition using SiF4 and hydrogen | M. Ziaul Karim, Dongqing Li, Jeong Soo Byun | 2005-06-07 |
| 6511923 | Deposition of stable dielectric films | Yaxin Wang, Michael Barnes, Farhad Moghadam | 2003-01-28 |
| 6117244 | Deposition resistant lining for CVD chamber | Won Bae Bang, Ellie Yieh | 2000-09-12 |
| 6110556 | Lid assembly for a process chamber employing asymmetric flow geometries | Won Bae Bang, Ellie Yieh | 2000-08-29 |
| 6047713 | Method for cleaning a throttle valve | Stuardo Robles, Bang Nguyen | 2000-04-11 |
| 6012600 | Pressure responsive clamp for a processing chamber | Eugene Fukshansky, David Wanamaker | 2000-01-11 |
| 5968588 | In-situ liquid flow rate estimation and verification by sonic flow method | Visweswaren Sivaramakrishnan, Yen-Kun Wang, Fong Chang, Jeff Plante | 1999-10-19 |
| 5871813 | Apparatus and method for controlling process chamber pressure | — | 1999-02-16 |
| 5866795 | Liquid flow rate estimation and verification by direct liquid measurement | Yen-Kun Wang, Fong Chang, Jeff Plante | 1999-02-02 |
| 5707451 | Method and apparatus for cleaning a throttle valve | Stuardo Robles, Bang Nguyen | 1998-01-13 |