Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7034563 | Apparatus for measuring of thin dielectric layer properties on semiconductor wafers with contact self aligning electrodes | Vitali Souchkov, Vladimir N. Faifer, Victor Huang, Alexander Artjomov, Anatoli Skljarnov | 2006-04-25 |
| 6019848 | Lid assembly for high temperature processing chamber | Jonathan Frankel, Inna Shmurun, Visweswaren Sivaramakrishnan | 2000-02-01 |
| 6012600 | Pressure responsive clamp for a processing chamber | Thanh Pham, David Wanamaker | 2000-01-11 |