Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8597011 | Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections | Andrzei Kaszuba, Juan Carlos Rocha-Alvarez, Thomas Nowak, Sanjeev Baluja, Ashish Shah | 2013-12-03 |
| 7909595 | Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections | Andrzei Kaszuba, Juan Carlos Rocha-Alvarez, Thomas Nowak, Sanjeev Baluja, Ashish Shah | 2011-03-22 |
| 7654224 | Method and apparatus for cleaning a CVD chamber | Maosheng Zhao, Juan Carlos Rocha-Alvarez, Soova Sen, Mao D. Lim, Shankar Venkataraman +1 more | 2010-02-02 |
| 7628863 | Heated gas box for PECVD applications | Soovo Sen, Thomas Nowak, Nancy Fung, Brian Hopper, Andrzej Kaszuba +1 more | 2009-12-08 |
| 7500445 | Method and apparatus for cleaning a CVD chamber | Maosheng Zhao, Juan Carlos Rocha-Alvarez, Soova Sen, Mao D. Lim, Shankar Venkataraman +1 more | 2009-03-10 |
| 7465357 | Computer-readable medium that contains software for executing a method for cleaning a CVD chamber | Maosheng Zhao, Juan Carlos Rocha-Alvarez, Soova Sen, Mao D. Lim, Shankar Venkataraman +1 more | 2008-12-16 |
| 7464717 | Method for cleaning a CVD chamber | Maosheng Zhao, Juan Carlos Rocha-Alvarez, Soova Sen, Mao D. Lim, Shankar Venkataraman +1 more | 2008-12-16 |
| 6946033 | Heated gas distribution plate for a processing chamber | Lun Tsuei, Soovo Sen, Ju-Hyung Lee, Juan Carlos Rocha-Alvarez, Maosheng Zhao +2 more | 2005-09-20 |
| 6645303 | Heater/lift assembly for high temperature processing chamber | Jonathan Frankel, Hari Ponnekanti, Visweswaren Sivaramakrishnan | 2003-11-11 |
| 6506994 | Low profile thick film heaters in multi-slot bake chamber | Yen-Kun Wang, Mark Fodor, Chen-An Chen, Himanshu Pokharna, Son T. Nguyen +1 more | 2003-01-14 |
| 6495233 | Apparatus for distributing gases in a chemical vapor deposition system | Scott A. Hendrickson, Gwendolyn D. Jones, Shankar Venkataraman, Son T. Nguyen, I-Chun Liu | 2002-12-17 |
| 6300255 | Method and apparatus for processing semiconductive wafers | Shankar Venkataranan, Scott A. Hendrickson, Son T. Nguyen | 2001-10-09 |
| 6019848 | Lid assembly for high temperature processing chamber | Jonathan Frankel, Visweswaren Sivaramakrishnan, Eugene Fukshansky | 2000-02-01 |