Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10738928 | Manifold assembly | Ron Arizpe, Timothy Long, Adam Hardman, Matthew Green | 2020-08-11 |
| 9714465 | Gas distribution blocker apparatus | Alan Tso, Tom K. Cho, Brian Sy-Yuan Shieh | 2017-07-25 |
| 9568138 | Manifold assembly | Ron Arizpe, Timothy Long, Adam Hardman, Matthew Green | 2017-02-14 |
| 8333842 | Apparatus for etching semiconductor wafers | Dmitry Lubomirsky, Tien Fak Tan | 2012-12-18 |
| 7806383 | Slit valve | Toan Q. Tran, Dimitry Lubormirsky, Won Bae Bang | 2010-10-05 |
| 6946033 | Heated gas distribution plate for a processing chamber | Soovo Sen, Ju-Hyung Lee, Juan Carlos Rocha-Alvarez, Inna Shmurun, Maosheng Zhao +2 more | 2005-09-20 |