Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9714465 | Gas distribution blocker apparatus | Lun Tsuei, Alan Tso, Tom K. Cho | 2017-07-25 |
| 6949203 | System level in-situ integrated dielectric etch process particularly useful for copper dual damascene | Chang-Lin Hsieh, Diana Xiaobing Ma, Gerald Yin, Jennifer Y. Sun, Senh Thach +2 more | 2005-09-27 |
| 6793835 | System level in-situ integrated dielectric etch process particularly useful for copper dual damascene | Lee Luo, Claes Bjorkman, Gerald Yin | 2004-09-21 |
| 6500357 | System level in-situ integrated dielectric etch process particularly useful for copper dual damascene | Lee Luo, Claes Bjorkman, Gerald Yin | 2002-12-31 |
| 5643394 | Gas injection slit nozzle for a plasma process reactor | Dan Maydan, Steve S. Y. Mak, Donald Olgado, Gerald Yin, Timothy D. Driscoll +1 more | 1997-07-01 |
| 5545289 | Passivating, stripping and corrosion inhibition of semiconductor substrates | Jian-Sheng Chen, James S. Papanu, Steve S. Y. Mak, Carmel Ish-Shalom, Peter Hsieh +5 more | 1996-08-13 |
| 5384009 | Plasma etching using xenon | Steven Mak, Charles S. Rhoades | 1995-01-24 |