Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458516 | Method of etching dielectric layers using a removable hardmask | Yan Ye, Pavel Ionov, Allen Zhao, Diana Xiaobing Ma, Chun Yan +1 more | 2002-10-01 |
| 6352081 | Method of cleaning a semiconductor device processing chamber after a copper etch process | Danny Lu, Allen Zhao, Hong Shih, Li Xu, Yan Ye | 2002-03-05 |
| 6331380 | Method of pattern etching a low K dielectric layer | Yan Ye, Pavel Ionov, Allen Zhao, Diana Xiaobing Ma, Chun Yan +1 more | 2001-12-18 |
| 6143476 | Method for high temperature etching of patterned layers using an organic mask stack | Yan Ye, Allen Zhao, Diana Xiaobing Ma | 2000-11-07 |
| 6080529 | Method of etching patterned layers useful as masking during subsequent etching or for damascene structures | Yan Ye, Pavel Ionov, Allen Zhao, Diana Xiaobing Ma, Chun Yan +1 more | 2000-06-27 |
| 5545289 | Passivating, stripping and corrosion inhibition of semiconductor substrates | Jian-Sheng Chen, James S. Papanu, Steve S. Y. Mak, Carmel Ish-Shalom, Wesley Lau +5 more | 1996-08-13 |