Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6367410 | Closed-loop dome thermal control apparatus for a semiconductor wafer processing system | Patrick Leahey, Jerry Chen, Richard E. Remington, Simon Yavelberg, Robert E. Ryan +3 more | 2002-04-09 |
| 5897712 | Plasma uniformity control for an inductive plasma source | Hiroji Hanawa, Peter Loewenhardt, Gerald Yin | 1999-04-27 |
| 5885358 | Gas injection slit nozzle for a plasma process reactor | Dan Maydan, Steve S. Y. Mak, Donald Olgado, Gerald Yin, James S. Papanu +1 more | 1999-03-23 |
| 5746875 | Gas injection slit nozzle for a plasma process reactor | Dan Maydan, Steve S. Y. Mak, Donald Olgado, Gerald Yin, James S. Papanu +1 more | 1998-05-05 |
| 5643394 | Gas injection slit nozzle for a plasma process reactor | Dan Maydan, Steve S. Y. Mak, Donald Olgado, Gerald Yin, Brian Sy-Yuan Shieh +1 more | 1997-07-01 |
| 5328312 | Dual load-path fastener | — | 1994-07-12 |