Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148597 | Multi-zone gas distribution systems and methods | Saravjeet Singh, Kenneth D. Schatz, Marlin Wijekoon, Dimitri Kioussis | 2024-11-19 |
| 11637002 | Methods and systems to enhance process uniformity | Saravjeet Singh, Jingchun Zhang, Zihui Li, Hanshen Zhang, Dmitry Lubomirsky | 2023-04-25 |
| 11609505 | Apparatus and methods for verification and re-use of process fluids | Mangesh Ashok BANGAR, Gautam Pisharody, Lancelot HUANG, Douglas A. Buchberger, Jr., Huixiong Dai +3 more | 2023-03-21 |
| 11581165 | Multi-zone gas distribution systems and methods | Saravjeet Singh, Kenneth D. Schatz, Marlin Wijekoon, Dimitri Kioussis | 2023-02-14 |
| 11239061 | Methods and systems to enhance process uniformity | Saravjeet Singh, Jingchun Zhang, Zihui Li, Hanshen Zhang, Dmitry Lubomirsky | 2022-02-01 |
| 10903054 | Multi-zone gas distribution systems and methods | Saravjeet Singh, Kenneth D. Schatz, Marlin Wijekoon, Dimitri Kioussis | 2021-01-26 |
| 9714465 | Gas distribution blocker apparatus | Lun Tsuei, Tom K. Cho, Brian Sy-Yuan Shieh | 2017-07-25 |
| 8728918 | Method and apparatus for fabricating silicon heterojunction solar cells | Shuran Sheng, Lin Zhang, Zheng Yuan, Rongping Wang | 2014-05-20 |