| 12013291 |
Advanced temperature monitoring system with expandable modular layout design |
Lin Zhang, Joseph C. Werner |
2024-06-18 |
| 11866821 |
Substrate support cover for high-temperature corrosive environment |
Lin Zhang, Jiyong Huang, Joseph C. Werner, Stanley Wu, Mahesh Adinath Kanawade +3 more |
2024-01-09 |
| 11846011 |
Lid stack for high frequency processing |
Lin Zhang, Joseph C. Werner |
2023-12-19 |
| 11837448 |
High-temperature chamber and chamber component cleaning and maintenance method and apparatus |
Lin Zhang, Jiyong Huang, Jang Seok OH, Joseph C. Werner, Nitin Khurana +4 more |
2023-12-05 |
| 11768984 |
Parameter sensing and computer modeling for gas delivery health monitoring |
Ala Moradian, James L'HEUREUX, Rohit Mahakali, Karthik Ramanathan, Lin Zhang +4 more |
2023-09-26 |
| 11532464 |
Reactor design for large-area VHF plasma processing with improved uniformity |
Shinobu ABE, Keita KUWAHARA, Chang-Hee Shin, Su Ho Cho |
2022-12-20 |
| 11499231 |
Lid stack for high frequency processing |
Lin Zhang, Joseph C. Werner |
2022-11-15 |
| 11215934 |
In-situ light detection methods and apparatus for ultraviolet semiconductor substrate processing |
Ralph P. ANTONIO, Lin Zhang, Joseph C. Werner |
2022-01-04 |
| 11094647 |
Methods and apparatus to eliminate wafer bow for CVD and patterning HVM systems |
Lin Zhang, Joseph C. Werner |
2021-08-17 |
| 10453728 |
Exchange and flip chamber design for heterojunction solar cell formation |
Kyung Tae Kim, Su Ho Cho, Tsunehiko KITAMURA, Shinobu ABE |
2019-10-22 |
| 10330612 |
Multi-function x-ray metrology tool for production inspection/monitoring of thin films and multidimensional structures |
Lin Zhang, Andrew V. LE |
2019-06-25 |
| 10047440 |
Methods and apparatus for uniformly and high-rate depositing low resistivity microcrystalline silicon films for display devices |
Su Ho Cho |
2018-08-14 |
| 8895842 |
High quality TCO-silicon interface contact structure for high efficiency thin film silicon solar cells |
Yong Kee Chae, Stefan Klein, Amir Al-Bayati, Bhaskar Kumar |
2014-11-25 |
| 8728918 |
Method and apparatus for fabricating silicon heterojunction solar cells |
Lin Zhang, Zheng Yuan, Rongping Wang, Alan Tso |
2014-05-20 |
| 8252624 |
Method of manufacturing thin film solar cells having a high conversion efficiency |
David Tanner, Hien Minh Le, Quancheng (Tommy) Gu, Yong Kee Chae, Tzay-Fa Su +1 more |
2012-08-28 |
| 8225496 |
Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated |
Robert Z. Bachrach, Yong Kee Chae, Soo Young Choi, Nicholas G. J. de Vries, Yacov Elgar +22 more |
2012-07-24 |
| 8203071 |
Multi-junction solar cells and methods and apparatuses for forming the same |
Yong Kee Chae, Soo Young Choi, Tae Kyung Won, Liwei Li |
2012-06-19 |
| 8026157 |
Gas mixing method realized by back diffusion in a PECVD system with showerhead |
Xiesen Yang, Yong Kee Chae, Liwei Li |
2011-09-27 |
| 7964430 |
Silicon layer on a laser transparent conductive oxide layer suitable for use in solar cell applications |
Tae Kyung Won, Soo Young Choi, Yong Kee Chae, Liwei Li |
2011-06-21 |
| 7919398 |
Microcrystalline silicon deposition for thin film solar applications |
Yong Kee Chae, Soo Young Choi |
2011-04-05 |
| 7741144 |
Plasma treatment between deposition processes |
Soo Young Choi, Yong Kee Chae, Liwei Li |
2010-06-22 |
| 7582515 |
Multi-junction solar cells and methods and apparatuses for forming the same |
Soo Young Choi, Yong Kee Chae |
2009-09-01 |
