Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12013291 | Advanced temperature monitoring system with expandable modular layout design | Lin Zhang, Joseph C. Werner | 2024-06-18 |
| 11866821 | Substrate support cover for high-temperature corrosive environment | Lin Zhang, Jiyong Huang, Joseph C. Werner, Stanley Wu, Mahesh Adinath Kanawade +3 more | 2024-01-09 |
| 11846011 | Lid stack for high frequency processing | Lin Zhang, Joseph C. Werner | 2023-12-19 |
| 11837448 | High-temperature chamber and chamber component cleaning and maintenance method and apparatus | Lin Zhang, Jiyong Huang, Jang Seok OH, Joseph C. Werner, Nitin Khurana +4 more | 2023-12-05 |
| 11768984 | Parameter sensing and computer modeling for gas delivery health monitoring | Ala Moradian, James L'HEUREUX, Rohit Mahakali, Karthik Ramanathan, Lin Zhang +4 more | 2023-09-26 |
| 11532464 | Reactor design for large-area VHF plasma processing with improved uniformity | Shinobu ABE, Keita KUWAHARA, Chang-Hee Shin, Su Ho Cho | 2022-12-20 |
| 11499231 | Lid stack for high frequency processing | Lin Zhang, Joseph C. Werner | 2022-11-15 |
| 11215934 | In-situ light detection methods and apparatus for ultraviolet semiconductor substrate processing | Ralph P. ANTONIO, Lin Zhang, Joseph C. Werner | 2022-01-04 |
| 11094647 | Methods and apparatus to eliminate wafer bow for CVD and patterning HVM systems | Lin Zhang, Joseph C. Werner | 2021-08-17 |
| 10453728 | Exchange and flip chamber design for heterojunction solar cell formation | Kyung Tae Kim, Su Ho Cho, Tsunehiko KITAMURA, Shinobu ABE | 2019-10-22 |
| 10330612 | Multi-function x-ray metrology tool for production inspection/monitoring of thin films and multidimensional structures | Lin Zhang, Andrew V. LE | 2019-06-25 |
| 10047440 | Methods and apparatus for uniformly and high-rate depositing low resistivity microcrystalline silicon films for display devices | Su Ho Cho | 2018-08-14 |
| 8895842 | High quality TCO-silicon interface contact structure for high efficiency thin film silicon solar cells | Yong Kee Chae, Stefan Klein, Amir Al-Bayati, Bhaskar Kumar | 2014-11-25 |
| 8728918 | Method and apparatus for fabricating silicon heterojunction solar cells | Lin Zhang, Zheng Yuan, Rongping Wang, Alan Tso | 2014-05-20 |
| 8252624 | Method of manufacturing thin film solar cells having a high conversion efficiency | David Tanner, Hien Minh Le, Quancheng (Tommy) Gu, Yong Kee Chae, Tzay-Fa Su +1 more | 2012-08-28 |
| 8225496 | Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated | Robert Z. Bachrach, Yong Kee Chae, Soo Young Choi, Nicholas G. J. de Vries, Yacov Elgar +22 more | 2012-07-24 |
| 8203071 | Multi-junction solar cells and methods and apparatuses for forming the same | Yong Kee Chae, Soo Young Choi, Tae Kyung Won, Liwei Li | 2012-06-19 |
| 8026157 | Gas mixing method realized by back diffusion in a PECVD system with showerhead | Xiesen Yang, Yong Kee Chae, Liwei Li | 2011-09-27 |
| 7964430 | Silicon layer on a laser transparent conductive oxide layer suitable for use in solar cell applications | Tae Kyung Won, Soo Young Choi, Yong Kee Chae, Liwei Li | 2011-06-21 |
| 7919398 | Microcrystalline silicon deposition for thin film solar applications | Yong Kee Chae, Soo Young Choi | 2011-04-05 |
| 7741144 | Plasma treatment between deposition processes | Soo Young Choi, Yong Kee Chae, Liwei Li | 2010-06-22 |
| 7582515 | Multi-junction solar cells and methods and apparatuses for forming the same | Soo Young Choi, Yong Kee Chae | 2009-09-01 |