Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288704 | Methods and apparatus for processing a substrate | Lee Guan Tay, Peter Lai, Sudhir Gondhalekar, Tzu-Fang Huang, Jeffrey C. Hudgens | 2025-04-29 |
| 11215934 | In-situ light detection methods and apparatus for ultraviolet semiconductor substrate processing | Shuran Sheng, Lin Zhang, Joseph C. Werner | 2022-01-04 |
| 10883932 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Lin Zhang, Xuesong Lu, Andrew V. LE, Fa Ji, Jang Seok OH +2 more | 2021-01-05 |
| 10365216 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Lin Zhang, Xuesong Lu, Andrew V. LE, Fa Ji, Jang Seok OH +2 more | 2019-07-30 |