Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10883932 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Lin Zhang, Xuesong Lu, Fa Ji, Jang Seok OH, Patrick L. Smith +2 more | 2021-01-05 |
| 10655223 | Advanced coating method and materials to prevent HDP-CVD chamber arcing | Lin Zhang, Xuesong Lu, Jang Seok OH | 2020-05-19 |
| 10580626 | Arcing detection apparatus for plasma processing | Lin Zhang, Rongping Wang, Jian J. Chen, Michael S. Cox | 2020-03-03 |
| 10365216 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Lin Zhang, Xuesong Lu, Fa Ji, Jang Seok OH, Patrick L. Smith +2 more | 2019-07-30 |
| 10330612 | Multi-function x-ray metrology tool for production inspection/monitoring of thin films and multidimensional structures | Lin Zhang, Shuran Sheng | 2019-06-25 |
| 10208380 | Advanced coating method and materials to prevent HDP-CVD chamber arcing | Lin Zhang, Xuesong Lu, Jang Seok OH | 2019-02-19 |
| 10002745 | Plasma treatment process for in-situ chamber cleaning efficiency enhancement in plasma processing chamber | Lin Zhang, Xuesong Lu, Jang Seok OH, Xinhai Han | 2018-06-19 |
| 7983776 | System and method for matching silicon oxide thickness between similar process tools | Miles Dudman | 2011-07-19 |
| 7789810 | Training tool for martial arts | — | 2010-09-07 |
| 6764265 | Erosion resistant slit valve | Charles S. Kunze, Muhammad M. Rasheed | 2004-07-20 |