Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10883932 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Lin Zhang, Xuesong Lu, Andrew V. LE, Jang Seok OH, Patrick L. Smith +2 more | 2021-01-05 | $38,335,000 |
| 10365216 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Lin Zhang, Xuesong Lu, Andrew V. LE, Jang Seok OH, Patrick L. Smith +2 more | 2019-07-30 | $47,427,000 |