Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8662886 | System for improved pressure control in horizontal diffusion furnace scavenger system for controlling oxide growth | — | 2014-03-04 |
| 7983776 | System and method for matching silicon oxide thickness between similar process tools | Andrew V. LE | 2011-07-19 |