Issued Patents All Time
Showing 25 most recent of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1017361 | Drill | — | 2024-03-12 |
| 11185815 | Plasma abatement of compounds containing heavy atoms | Monique McIntosh, Colin John Dickinson, Paul Fisher, Yutaka Tanaka, Zheng Yuan | 2021-11-30 |
| 11114289 | Non-disappearing anode for use with dielectric deposition | Lara Hawrylchak, Brian T. West | 2021-09-07 |
| 11114285 | Apparatus for exhaust cooling | Brian T. West, Roger M. Johnson, Yan Rozenzon, Dinkesh Somanna, Dustin W. Ho | 2021-09-07 |
| 11011356 | Sputtering target with backside cooling grooves | Brian T. West, Jeonghoon Oh | 2021-05-18 |
| 10930479 | Smart chamber and smart chamber components | Simon Nicholas Binns, Brian T. West, Ronald Vern Schauer, Roger M. Johnson | 2021-02-23 |
| 10867776 | Physical vapor deposition in-chamber electro-magnet | Brian T. West, Miroslav Gelo, Dinkesh Somanna | 2020-12-15 |
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Adolph Miller Allen, Lara Hawrylchak, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang +8 more | 2020-09-01 |
| 10757797 | Method and apparatus for gas abatement | Rongping Wang, Jibing Zeng, David Muquing HOU, Zheng Yuan, James L'HEUREUX | 2020-08-25 |
| 10714321 | Sputtering target with backside cooling grooves | Brian T. West, Jeonghoon Oh | 2020-07-14 |
| 10580626 | Arcing detection apparatus for plasma processing | Lin Zhang, Rongping Wang, Jian J. Chen, Andrew V. LE | 2020-03-03 |
| 10464498 | Quick access ATV mounted bow carrier | — | 2019-11-05 |
| 10449486 | Plasma abatement of compounds containing heavy atoms | Monique McIntosh, Colin John Dickinson, Paul Fisher, Yutaka Tanaka, Zheng Yuan | 2019-10-22 |
| 10344375 | Gas cooled substrate support for stabilized high temperature deposition | Brian T. West, Jeonghoon Oh | 2019-07-09 |
| 10332773 | Transparent electrostatic carrier | Leung Kway Lee, Pallavi Zhang | 2019-06-25 |
| 10236201 | Wafer carrier for smaller wafers and wafer pieces | Cheryl Knepfler | 2019-03-19 |
| 10187966 | Method and apparatus for gas abatement | Rongping Wang, Jibing Zeng, David Muquing HOU, Zheng Yuan, James L'HEUREUX | 2019-01-22 |
| 10176973 | Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system | Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson | 2019-01-08 |
| 10153143 | Smart chamber and smart chamber components | Simon Nicholas Binns, Brian T. West, Ronald Vern Schauer, Roger M. Johnson | 2018-12-11 |
| 10049863 | Sputtering target with backside cooling grooves | Brian T. West, Jeonghoon Oh | 2018-08-14 |
| 9984912 | Locally heated multi-zone substrate support | — | 2018-05-29 |
| 9867238 | Apparatus for treating an exhaust gas in a foreline | Colin John Dickinson | 2018-01-09 |
| 9790589 | Gas cooled substrate support for stabilized high temperature deposition | Brian T. West, Jeonghoon Oh | 2017-10-17 |
| 9779975 | Electrostatic carrier for thin substrate handling | — | 2017-10-03 |
| 9779920 | Sputtering target with backside cooling grooves | Brian T. West, Jeonghoon Oh | 2017-10-03 |