| D1017361 |
Drill |
— |
2024-03-12 |
|
| 11185815 |
Plasma abatement of compounds containing heavy atoms |
Monique McIntosh, Colin John Dickinson, Paul Fisher, Yutaka Tanaka, Zheng Yuan |
2021-11-30 |
$50,552,000 |
| 11114289 |
Non-disappearing anode for use with dielectric deposition |
Lara Hawrylchak, Brian T. West |
2021-09-07 |
$49,370,000 |
| 11114285 |
Apparatus for exhaust cooling |
Brian T. West, Roger M. Johnson, Yan Rozenzon, Dinkesh Somanna, Dustin W. Ho |
2021-09-07 |
$49,370,000 |
| 11011356 |
Sputtering target with backside cooling grooves |
Brian T. West, Jeonghoon Oh |
2021-05-18 |
$51,490,000 |
| 10930479 |
Smart chamber and smart chamber components |
Simon Nicholas Binns, Brian T. West, Ronald Vern Schauer, Roger M. Johnson |
2021-02-23 |
$34,793,000 |
| 10867776 |
Physical vapor deposition in-chamber electro-magnet |
Brian T. West, Miroslav Gelo, Dinkesh Somanna |
2020-12-15 |
$107,472,000 |
| 10763090 |
High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process |
Adolph Miller Allen, Lara Hawrylchak, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang +8 more |
2020-09-01 |
$30,946,000 |
| 10757797 |
Method and apparatus for gas abatement |
Rongping Wang, Jibing Zeng, David Muquing HOU, Zheng Yuan, James L'HEUREUX |
2020-08-25 |
$29,525,000 |
| 10714321 |
Sputtering target with backside cooling grooves |
Brian T. West, Jeonghoon Oh |
2020-07-14 |
$28,056,000 |
| 10580626 |
Arcing detection apparatus for plasma processing |
Lin Zhang, Rongping Wang, Jian J. Chen, Andrew V. LE |
2020-03-03 |
$21,905,000 |
| 10464498 |
Quick access ATV mounted bow carrier |
— |
2019-11-05 |
|
| 10449486 |
Plasma abatement of compounds containing heavy atoms |
Monique McIntosh, Colin John Dickinson, Paul Fisher, Yutaka Tanaka, Zheng Yuan |
2019-10-22 |
$16,291,000 |
| 10344375 |
Gas cooled substrate support for stabilized high temperature deposition |
Brian T. West, Jeonghoon Oh |
2019-07-09 |
$20,979,000 |
| 10332773 |
Transparent electrostatic carrier |
Leung Kway Lee, Pallavi Zhang |
2019-06-25 |
$45,457,000 |
| 10236201 |
Wafer carrier for smaller wafers and wafer pieces |
Cheryl Knepfler |
2019-03-19 |
$17,059,000 |
| 10187966 |
Method and apparatus for gas abatement |
Rongping Wang, Jibing Zeng, David Muquing HOU, Zheng Yuan, James L'HEUREUX |
2019-01-22 |
$28,931,000 |
| 10176973 |
Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system |
Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson |
2019-01-08 |
$16,165,000 |
| 10153143 |
Smart chamber and smart chamber components |
Simon Nicholas Binns, Brian T. West, Ronald Vern Schauer, Roger M. Johnson |
2018-12-11 |
$26,076,000 |
| 10049863 |
Sputtering target with backside cooling grooves |
Brian T. West, Jeonghoon Oh |
2018-08-14 |
$24,993,000 |
| 9984912 |
Locally heated multi-zone substrate support |
— |
2018-05-29 |
$37,048,000 |
| 9867238 |
Apparatus for treating an exhaust gas in a foreline |
Colin John Dickinson |
2018-01-09 |
$16,545,000 |
| 9790589 |
Gas cooled substrate support for stabilized high temperature deposition |
Brian T. West, Jeonghoon Oh |
2017-10-17 |
$65,021,000 |
| 9779975 |
Electrostatic carrier for thin substrate handling |
— |
2017-10-03 |
$36,306,000 |
| 9779920 |
Sputtering target with backside cooling grooves |
Brian T. West, Jeonghoon Oh |
2017-10-03 |
$36,306,000 |
