Issued Patents All Time
Showing 25 most recent of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11981989 | Automated temperature controlled substrate support | Robert Hartwig, Dinkesh HUDERI SOMANNA | 2024-05-14 |
| 11469080 | Magnetron assembly having coolant guide for enhanced target cooling | Dinkesh HUDERI SOMANNA, Jeonghoon Oh | 2022-10-11 |
| 11251067 | Pedestal lift for semiconductor processing chambers | Miroslav Gelo, Yan Rozenzon, Roger M. Johnson, Mark William Covington, Soundarrajan JEMBULINGAM +2 more | 2022-02-15 |
| 11114289 | Non-disappearing anode for use with dielectric deposition | Michael S. Cox, Lara Hawrylchak | 2021-09-07 |
| 11114285 | Apparatus for exhaust cooling | Michael S. Cox, Roger M. Johnson, Yan Rozenzon, Dinkesh Somanna, Dustin W. Ho | 2021-09-07 |
| 11072852 | Pre-conditioned chamber components | Lizhong Sun, William M. Lu | 2021-07-27 |
| 11056372 | Low temperature biasable substrate support | Soundarrajan JEMBULINGAM, Dinkesh HUDERI SOMANNA | 2021-07-06 |
| 11011356 | Sputtering target with backside cooling grooves | Michael S. Cox, Jeonghoon Oh | 2021-05-18 |
| 10930479 | Smart chamber and smart chamber components | Simon Nicholas Binns, Ronald Vern Schauer, Roger M. Johnson, Michael S. Cox | 2021-02-23 |
| 10867776 | Physical vapor deposition in-chamber electro-magnet | Michael S. Cox, Miroslav Gelo, Dinkesh Somanna | 2020-12-15 |
| 10781518 | Gas cooled electrostatic chuck (ESC) having a gas channel formed therein and coupled to a gas box on both ends of the gas channel | Manoj A. Gajendra, Soundarrajan JEMBULINGAM | 2020-09-22 |
| 10714321 | Sputtering target with backside cooling grooves | Michael S. Cox, Jeonghoon Oh | 2020-07-14 |
| 10662520 | Method for recycling substrate process components | — | 2020-05-26 |
| 10344375 | Gas cooled substrate support for stabilized high temperature deposition | Michael S. Cox, Jeonghoon Oh | 2019-07-09 |
| 10176973 | Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system | Michael S. Cox, Rongping Wang, Roger M. Johnson, Colin John Dickinson | 2019-01-08 |
| 10153143 | Smart chamber and smart chamber components | Simon Nicholas Binns, Ronald Vern Schauer, Roger M. Johnson, Michael S. Cox | 2018-12-11 |
| 10049863 | Sputtering target with backside cooling grooves | Michael S. Cox, Jeonghoon Oh | 2018-08-14 |
| 9865489 | Substrate support chuck cooling for deposition chamber | Vijay D. Parkhe, Robert T. Hirahara, Dan DEYO | 2018-01-09 |
| 9790589 | Gas cooled substrate support for stabilized high temperature deposition | Michael S. Cox, Jeonghoon Oh | 2017-10-17 |
| 9779920 | Sputtering target with backside cooling grooves | Michael S. Cox, Jeonghoon Oh | 2017-10-03 |
| 9779917 | Process chamber gas flow improvements | Stanley Detmar, Ronald Vern Schauer | 2017-10-03 |
| 9767990 | Apparatus for treating a gas in a conduit | Jibing Zeng, Rongping Wang, Manoj A. Gajendra | 2017-09-19 |
| 9754771 | Encapsulated magnetron | Roger M. Johnson, Michael S. Cox | 2017-09-05 |
| 9749688 | Systems and methods for determining multi-platform media ratings | Lisa Heimann | 2017-08-29 |
| 9668373 | Substrate support chuck cooling for deposition chamber | Vijay D. Parkhe, Robert T. Hirahara, Dan DEYO | 2017-05-30 |