Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9552967 | Abatement system having a plasma source | Michael S. Cox, Rongping Wang, Roger M. Johnson, Colin John Dickinson | 2017-01-24 |
| 9543124 | Capacitively coupled plasma source for abating compounds produced in semiconductor processes | Michael S. Cox, Rongping Wang, Roger M. Johnson, Colin John Dickinson | 2017-01-10 |
| 9378928 | Apparatus for treating a gas in a conduit | Jibing Zeng, Rongping Wang, Manoj A. Gajendra | 2016-06-28 |
| 9240308 | Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system | Michael S. Cox, Rongping Wang, Roger M. Johnson, Colin John Dickinson | 2016-01-19 |
| 9230780 | Hall effect enhanced capacitively coupled plasma source | Michael S. Cox, Rongping Wang, Roger M. Johnson, Colin John Dickinson | 2016-01-05 |
| 9096927 | Cooling ring for physical vapor deposition chamber target | Goichi Yoshidome, Ralf Hofmann | 2015-08-04 |
| 8828182 | Process chamber gas flow improvements | Stanley Detmar, Ronald Vern Schauer | 2014-09-09 |
| 8142989 | Textured chamber surface | Karl Brueckner, Hong Wang | 2012-03-27 |
| 7993470 | Fabricating and cleaning chamber components having textured surfaces | Marc Schweitzer, Jennifer Watia | 2011-08-09 |
| 7759475 | Enzyme expression methods and compositions | — | 2010-07-20 |
| 7618769 | Textured chamber surface | Karl Brueckner, Hong Wang | 2009-11-17 |
| 7517970 | Nucleic acids encoding kinase and phosphatase enzymes, expression vectors and cells containing same | — | 2009-04-14 |
| 7264679 | Cleaning of chamber components | Marc Schweitzer, Jennifer Tiller, Karl Brueckner | 2007-09-04 |
| 7185760 | Non-contact protective packaging for surface-sensitive articles | Ronald Vern Schauer, Jim Wang, Hong Wang, Yongxiang He | 2007-03-06 |
| 7048814 | Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus | Yixing Lin, Hong Wang, Shun Wu, Jennifer Y. Sun, Clifford Stow +1 more | 2006-05-23 |
| 7033447 | Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus | Yixing Lin, Shun Wu, Clifford Stow, Senh Thach, Hong Wang +1 more | 2006-04-25 |
| 6812471 | Method of surface texturizing | Alan Popiolkowski, Shannon Hart, Marc Schweitzer, Alan Liu, Jennifer Watia +1 more | 2004-11-02 |
| 6713188 | Clean aluminum alloy for semiconductor processing equipment | Shun Wu, Clifford Stow, Hong Wang, Yixing Lin | 2004-03-30 |