Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7762114 | Flow-formed chamber component having a textured surface | Stephen Abney, Anthony Vesci, Joseph F. Sommers, Marc Schweitzer, Scott Dickerson | 2010-07-27 |
| 7718045 | Ground shield with reentrant feature | Anantha K. Subramani, Michael S. Cox, Keith A. Miller | 2010-05-18 |
| 7264679 | Cleaning of chamber components | Marc Schweitzer, Brian T. West, Karl Brueckner | 2007-09-04 |