| 7561015 |
Magnet secured in a two part shell |
Anthony Vesci, Donny Young, Joe Sommers, Kevin Hughes |
2009-07-14 |
| 7097744 |
Method and apparatus for controlling darkspace gap in a chamber |
Marc Schweitzer, James Van Gogh, Michael Rosenstein, Jennifer Watia, Xinyu Zhang +3 more |
2006-08-29 |
| 6933508 |
Method of surface texturizing |
Alan Popiolkowski, Shannon Hart, Marc Schweitzer, Jennifer Watia |
2005-08-23 |
| 6812471 |
Method of surface texturizing |
Alan Popiolkowski, Shannon Hart, Marc Schweitzer, Jennifer Watia, Brian T. West +1 more |
2004-11-02 |
| 6797131 |
Design of hardware features to facilitate arc-spray coating applications and functions |
Chien-Shiung Tzou, James Tsung |
2004-09-28 |
| 6730174 |
Unitary removable shield assembly |
Ilya Lavitsky, Michael Rosenstein |
2004-05-04 |
| 6620296 |
Target sidewall design to reduce particle generation during magnetron sputtering |
James Gogh, Jim Thompson, Marc Schweitzer, Yoichiro Tanaka, ANTHONY CHAN +2 more |
2003-09-16 |
| 6228236 |
Sputter magnetron having two rotation diameters |
Michael Rosenstein, Jianming Fu, Leif DeLaurentis, James Van Gogh |
2001-05-08 |
