| 9318306 |
Interchangeable sputter gun head |
Owen Ho Yin Fong, Timothy Joseph Franklin, Stephen C. Garner |
2016-04-19 |
$366,000 |
| 9269567 |
High productivity combinatorial processing using pressure-controlled one-way valves |
Chien-Lan Hsueh, Chen-An Chen, Tony P. Chiang, Martin Romero |
2016-02-23 |
$429,000 |
| 9161738 |
Ultrasonic probe device and system and methods of generating ultrasonic images |
— |
2015-10-20 |
|
| 9087864 |
Multipurpose combinatorial vapor phase deposition chamber |
Chen-An Chen, Tony P. Chiang, Frank Greer, Martin Romero |
2015-07-21 |
$644,000 |
| 8974649 |
Combinatorial RF bias method for PVD |
ShouQian Shao, Kent Riley Child, Hong Sheng Yang |
2015-03-10 |
$108,000 |
| 8932995 |
Combinatorial process system |
Rick Endo, Kurt H. Weiner, Indranil De, Maosheng Zhao, Jeremy Cheng |
2015-01-13 |
$704,000 |
| 8815013 |
Method and system for isolated and discretized process sequence integration |
Tony P. Chiang, Richard Endo |
2014-08-26 |
$276,000 |
| 8770143 |
Multi-region processing system |
Rick Endo, Kurt H. Weiner, Indranil De, Maosheng Zhao |
2014-07-08 |
$438,000 |
| 8771483 |
Combinatorial process system |
Rick Endo, Kurt H. Weiner, Indranil De, Maosheng Zhao, Jeremy Cheng |
2014-07-08 |
$438,000 |
| 8758581 |
Combinatorial process system |
Rick Endo, Kurt H. Weiner, Indranil De, Maosheng Zhao, Jeremy Cheng |
2014-06-24 |
$794,000 |
| 8500908 |
Method and system for mask handling in high productivity chamber |
Rick Endo, Kurt H. Weiner |
2013-08-06 |
$903,000 |
| 8486821 |
Method and apparatus for variable conductance |
Rick Endo, Jay DeDontney |
2013-07-16 |
$753,000 |
| 8486844 |
Method and system for isolated and discretized process sequence integration |
Richard Endo, Tony P. Chiang |
2013-07-16 |
$753,000 |
| 8449678 |
Combinatorial process system |
Rick Endo, Kurt H. Weiner, Indranil De, Maosheng Zhao, Jeremy Cheng |
2013-05-28 |
$1,878,000 |
| 8387563 |
Combinatorial process system |
Rick Endo, Jeremy Cheng, Indranil De, Kurt H. Weiner, Maosheng Zhao |
2013-03-05 |
$1,413,000 |
| 8317925 |
Method and system for mask handling in high productivity chamber |
Rick Endo, Kurt H. Weiner |
2012-11-27 |
$514,000 |
| 8283264 |
Method and system for isolated and discretized process sequence integration |
Tony P. Chiang, Richard Endo |
2012-10-09 |
$1,800,000 |
| 8216376 |
Method and apparatus for variable conductance |
Rick Endo, Jay DeDontney |
2012-07-10 |
$1,445,000 |
| 8039052 |
Multi-region processing system and heads |
Rick Endo, Kurt H. Weiner, Indranil De, Maosheng Zhao |
2011-10-18 |
|
| 7993461 |
Method and system for mask handling in high productivity chamber |
Rick Endo, Kurt H. Weiner |
2011-08-09 |
|
| 7867904 |
Method and system for isolated and discretized process sequence integration |
Tony P. Chiang, Richard Endo |
2011-01-11 |
|
| 6797131 |
Design of hardware features to facilitate arc-spray coating applications and functions |
Alan Liu, Chien-Shiung Tzou |
2004-09-28 |
$20,273,000 |
