Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318306 | Interchangeable sputter gun head | Owen Ho Yin Fong, Timothy Joseph Franklin, Stephen C. Garner | 2016-04-19 |
| 9269567 | High productivity combinatorial processing using pressure-controlled one-way valves | Chien-Lan Hsueh, Chen-An Chen, Tony P. Chiang, Martin Romero | 2016-02-23 |
| 9161738 | Ultrasonic probe device and system and methods of generating ultrasonic images | — | 2015-10-20 |
| 9087864 | Multipurpose combinatorial vapor phase deposition chamber | Chen-An Chen, Tony P. Chiang, Frank Greer, Martin Romero | 2015-07-21 |
| 8974649 | Combinatorial RF bias method for PVD | ShouQian Shao, Kent Riley Child, Hong Sheng Yang | 2015-03-10 |
| 8932995 | Combinatorial process system | Rick Endo, Kurt H. Weiner, Indranil De, Maosheng Zhao, Jeremy Cheng | 2015-01-13 |
| 8815013 | Method and system for isolated and discretized process sequence integration | Tony P. Chiang, Richard Endo | 2014-08-26 |
| 8770143 | Multi-region processing system | Rick Endo, Kurt H. Weiner, Indranil De, Maosheng Zhao | 2014-07-08 |
| 8771483 | Combinatorial process system | Rick Endo, Kurt H. Weiner, Indranil De, Maosheng Zhao, Jeremy Cheng | 2014-07-08 |
| 8758581 | Combinatorial process system | Rick Endo, Kurt H. Weiner, Indranil De, Maosheng Zhao, Jeremy Cheng | 2014-06-24 |
| 8500908 | Method and system for mask handling in high productivity chamber | Rick Endo, Kurt H. Weiner | 2013-08-06 |
| 8486821 | Method and apparatus for variable conductance | Rick Endo, Jay DeDontney | 2013-07-16 |
| 8486844 | Method and system for isolated and discretized process sequence integration | Richard Endo, Tony P. Chiang | 2013-07-16 |
| 8449678 | Combinatorial process system | Rick Endo, Kurt H. Weiner, Indranil De, Maosheng Zhao, Jeremy Cheng | 2013-05-28 |
| 8387563 | Combinatorial process system | Rick Endo, Jeremy Cheng, Indranil De, Kurt H. Weiner, Maosheng Zhao | 2013-03-05 |
| 8317925 | Method and system for mask handling in high productivity chamber | Rick Endo, Kurt H. Weiner | 2012-11-27 |
| 8283264 | Method and system for isolated and discretized process sequence integration | Tony P. Chiang, Richard Endo | 2012-10-09 |
| 8216376 | Method and apparatus for variable conductance | Rick Endo, Jay DeDontney | 2012-07-10 |
| 8039052 | Multi-region processing system and heads | Rick Endo, Kurt H. Weiner, Indranil De, Maosheng Zhao | 2011-10-18 |
| 7993461 | Method and system for mask handling in high productivity chamber | Rick Endo, Kurt H. Weiner | 2011-08-09 |
| 7867904 | Method and system for isolated and discretized process sequence integration | Tony P. Chiang, Richard Endo | 2011-01-11 |
| 6797131 | Design of hardware features to facilitate arc-spray coating applications and functions | Alan Liu, Chien-Shiung Tzou | 2004-09-28 |