Patents per Year
Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11959174 | Shunt door for magnets in plasma process chamber | Kallol Bera, Sathya Swaroop Ganta, Timothy Joseph Franklin, Kaushik Alayavalli, Akshay Dhanakshirur +1 more | 2024-04-16 | $82,852,000 |
| 11587764 | Magnetic housing systems | Srinivas Gandikota, Tza-Jing Gung, Samuel E. Gottheim, Timothy Joseph Franklin, Pramit Manna +3 more | 2023-02-21 | $24,540,000 |
| 11560626 | Substrate processing chamber | Timothy Joseph Franklin, Adam J. Fischbach, Edward Haywood, Abhijit Basu Mallick, Pramit Manna +2 more | 2023-01-24 | $45,726,000 |
| 11557466 | Tuneable uniformity control utilizing rotational magnetic housing | Samuel E. Gottheim, Abhijit Basu Mallick, Pramit Manna, Eswaranand Venkatasubramanian, Timothy Joseph Franklin +2 more | 2023-01-17 | $39,427,000 |
| 9318306 | Interchangeable sputter gun head | Owen Ho Yin Fong, Timothy Joseph Franklin, James Tsung | 2016-04-19 | $366,000 |