Shunt door for magnets in plasma process chamber

Assignee

• Applied Materials

Inventors

• Kallol Bera (78 patents)
• Sathya Swaroop Ganta (6 patents)
• Timothy Joseph Franklin (38 patents)
• Kaushik Alayavalli (15 patents)
• Akshay Dhanakshirur (6 patents)
• Stephen C. Garner (5 patents)
• Bhaskar Kumar (27 patents)

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