Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12338530 | Shaped showerhead for edge plasma modulation | Saketh Pemmasani, Daemian Raj Benjamin Raj, Xiaopu Li, Mayur Govind Kulkarni, Madhu Santosh Kumar Mutyala +2 more | 2025-06-24 |
| 11984302 | Magnetic-material shield around plasma chambers near pedestal | Job George Konnoth Joseph, Sathya Swaroop Ganta, Kallol Bera, Andrew Nguyen, Jay D. Pinson, II +6 more | 2024-05-14 |
| 11959174 | Shunt door for magnets in plasma process chamber | Kallol Bera, Sathya Swaroop Ganta, Timothy Joseph Franklin, Kaushik Alayavalli, Stephen C. Garner +1 more | 2024-04-16 |
| 11929278 | Low impedance current path for edge non-uniformity tuning | Madhu Santosh Kumar Mutyala, Saketh Pemmasani, Mayur Govind Kulkarni, Hang Yu, Deenesh Padhi | 2024-03-12 |
| 11869795 | Mesa height modulation for thickness correction | Saketh Pemmasani, Mayur Govind Kulkarni, Madhu Santosh Kumar Mutyala, Hang Yu, Deenesh Padhi | 2024-01-09 |