| 12463036 |
High density carbon films for patterning applications |
Eswaranand Venkatasubramanian, Pramit Manna, Abhijit Basu Mallick |
2025-11-04 |
|
| 11842897 |
High density carbon films for patterning applications |
Eswaranand Venkatasubramanian, Pramit Manna, Abhijit Basu Mallick |
2023-12-12 |
$82,062,000 |
| 11676858 |
High bias deposition of high quality gapfill |
Eswaranand Venkatasubramanian, Pramit Manna, Abhijit Basu Mallick |
2023-06-13 |
$42,513,000 |
| 11638374 |
Multicolor approach to DRAM STI active cut patterning |
Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more |
2023-04-25 |
$46,789,000 |
| 11587764 |
Magnetic housing systems |
Srinivas Gandikota, Tza-Jing Gung, Timothy Joseph Franklin, Pramit Manna, Eswaranand Venkatasubramanian +3 more |
2023-02-21 |
$24,540,000 |
| 11557466 |
Tuneable uniformity control utilizing rotational magnetic housing |
Abhijit Basu Mallick, Pramit Manna, Eswaranand Venkatasubramanian, Timothy Joseph Franklin, Edward Haywood +2 more |
2023-01-17 |
$39,427,000 |
| 11430655 |
Low temperature high-quality dielectric films |
Eswaranand Venkatasubramanian, Pramit Manna, Abhijit Basu Mallick |
2022-08-30 |
$41,861,000 |
| 11332376 |
Diamond-like carbon film |
Eswaranand Venkatasubramanian, Pramit Manna, Abhijit Basu Mallick |
2022-05-17 |
$39,228,000 |
| 11335690 |
Multicolor approach to DRAM STI active cut patterning |
Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more |
2022-05-17 |
$39,228,000 |
| 11270905 |
Modulating film properties by optimizing plasma coupling materials |
Eswaranand Venkatasubramanian, Edward Haywood, Pramit Manna, Kien N. Chuc, Adam J. Fischbach +2 more |
2022-03-08 |
$69,139,000 |
| 11062939 |
High bias deposition of high quality gapfill |
Eswaranand Venkatasubramanian, Pramit Manna, Abhijit Basu Mallick |
2021-07-13 |
$86,517,000 |
| 11043372 |
High-density low temperature carbon films for hardmask and other patterning applications |
Eswaranand Venkatasubramanian, Yang Yang, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa +2 more |
2021-06-22 |
$66,836,000 |
| 10910381 |
Multicolor approach to DRAM STI active cut patterning |
Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more |
2021-02-02 |
$74,085,000 |
| 10840088 |
Low temperature high-quality dielectric films |
Eswaranand Venkatasubramanian, Pramit Manna, Abhijit Basu Mallick |
2020-11-17 |
$41,112,000 |
| 10745282 |
Diamond-like carbon film |
Eswaranand Venkatasubramanian, Pramit Manna, Abhijit Basu Mallick |
2020-08-18 |
$40,862,000 |
