| 12486577 |
Pulsed plasma (DC/RF) deposition of high quality C films for patterning |
Yang Yang, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick |
2025-12-02 |
|
| 12463036 |
High density carbon films for patterning applications |
Samuel E. Gottheim, Pramit Manna, Abhijit Basu Mallick |
2025-11-04 |
|
| 12362181 |
Methods of forming thermally stable carbon film |
Rajaram Narayanan, Pramit Manna, Abhijit Basu Mallick, Karthik Janakiraman, Jialiang Wang |
2025-07-15 |
|
| 12327733 |
Methods to reduce UNCD film roughness |
Vicknesh Sahmuganathan, Jiteng Gu, Kian Ping Loh, Abhijit Basu Mallick, John Sudijono |
2025-06-10 |
|
| 12037679 |
Method of forming a diamond film |
Vicknesh Sahmuganathan, Jiteng Gu, Zhongxin Chen, Kian Ping Loh, John Sudijono +5 more |
2024-07-16 |
$116,305,000 |
| 12014925 |
Metal-doped carbon hardmasks |
Bhaskar Jyoti Bhuyan, Mark Saly, Abhijit Basu Mallick |
2024-06-18 |
$83,264,000 |
| 11946134 |
In situ nucleation for nanocrystalline diamond film deposition |
Sze Chieh Tan, Vicknesh Sahmuganathan, Abhijit Basu Mallick, John Sudijono |
2024-04-02 |
$42,223,000 |
| 11894230 |
Tribological properties of diamond films |
Vicknesh Sahmuganathan, Jiteng Gu, Kian Ping Loh, Abhijit Basu Mallick, John Sudijono +1 more |
2024-02-06 |
$39,056,000 |
| 11842897 |
High density carbon films for patterning applications |
Samuel E. Gottheim, Pramit Manna, Abhijit Basu Mallick |
2023-12-12 |
$82,062,000 |
| 11784042 |
Carbon hard masks for patterning applications and methods related thereto |
Yang Yang, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick |
2023-10-10 |
$39,034,000 |
| 11676858 |
High bias deposition of high quality gapfill |
Samuel E. Gottheim, Pramit Manna, Abhijit Basu Mallick |
2023-06-13 |
$42,513,000 |
| 11638374 |
Multicolor approach to DRAM STI active cut patterning |
Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more |
2023-04-25 |
$46,789,000 |
| 11621160 |
Doped and undoped vanadium oxides for low-k spacer applications |
Srinivas Gandikota, Kelvin Chan, Atashi Basu, Abhijit Basu Mallick |
2023-04-04 |
$41,324,000 |
| 11603591 |
Pulsed plasma (DC/RF) deposition of high quality C films for patterning |
Yang Yang, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick |
2023-03-14 |
$86,512,000 |
| 11594416 |
Tribological properties of diamond films |
Vicknesh Sahmuganathan, Jiteng Gu, Kian Ping Loh, Abhijit Basu Mallick, John Sudijono +1 more |
2023-02-28 |
$49,197,000 |
| 11587764 |
Magnetic housing systems |
Srinivas Gandikota, Tza-Jing Gung, Samuel E. Gottheim, Timothy Joseph Franklin, Pramit Manna +3 more |
2023-02-21 |
$24,540,000 |
| 11560626 |
Substrate processing chamber |
Timothy Joseph Franklin, Adam J. Fischbach, Edward Haywood, Abhijit Basu Mallick, Pramit Manna +2 more |
2023-01-24 |
$45,726,000 |
| 11557466 |
Tuneable uniformity control utilizing rotational magnetic housing |
Samuel E. Gottheim, Abhijit Basu Mallick, Pramit Manna, Timothy Joseph Franklin, Edward Haywood +2 more |
2023-01-17 |
$39,427,000 |
| 11557478 |
In-situ high power implant to relieve stress of a thin film |
Pramit Manna, Abhijit Basu Mallick, Srinivas Gandikota |
2023-01-17 |
$39,427,000 |
| 11469097 |
Carbon hard masks for patterning applications and methods related thereto |
Yang Yang, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick |
2022-10-11 |
$43,708,000 |
| 11430655 |
Low temperature high-quality dielectric films |
Samuel E. Gottheim, Pramit Manna, Abhijit Basu Mallick |
2022-08-30 |
$41,861,000 |
| 11335690 |
Multicolor approach to DRAM STI active cut patterning |
Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more |
2022-05-17 |
$39,228,000 |
| 11332376 |
Diamond-like carbon film |
Samuel E. Gottheim, Pramit Manna, Abhijit Basu Mallick |
2022-05-17 |
$39,228,000 |
| 11270905 |
Modulating film properties by optimizing plasma coupling materials |
Edward Haywood, Samuel E. Gottheim, Pramit Manna, Kien N. Chuc, Adam J. Fischbach +2 more |
2022-03-08 |
$69,139,000 |
| 11158507 |
In-situ high power implant to relieve stress of a thin film |
Pramit Manna, Abhijit Basu Mallick, Srinivas Gandikota |
2021-10-26 |
$68,163,000 |
