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Radio frequency conduit |
Adam J. Fischbach, Canfeng Lai, Carlaton WONG |
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Modulating film properties by optimizing plasma coupling materials |
Eswaranand Venkatasubramanian, Edward Haywood, Samuel E. Gottheim, Pramit Manna, Adam J. Fischbach +2 more |
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Process kit for a high throughput processing chamber |
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Micro-volume deposition chamber |
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2020-07-14 |
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Semiconductor processing system and methods using capacitively coupled plasma |
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Gas distribution apparatus for processing chambers |
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2019-03-26 |
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Process kit including flow isolator ring |
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2018-07-10 |
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Semiconductor processing system and methods using capacitively coupled plasma |
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Plasma reactor inductive coil antenna with flat surface facing the plasma |
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1996-07-16 |
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Calibration technique for monochromators and spectrophotometers |
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1993-05-18 |
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Method and apparatus to inhibit obstruction of optical transmission through semiconductor etch process chamber viewport |
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1992-07-14 |
