Flow control features of CVD chambers

Assignee

• Applied Materials

Inventors

• Kien N. Chuc (23 patents)
• Qiwei Liang (76 patents)
• Hanh Nguyen (17 patents)
• Xinglong Chen (57 patents)
• Matthew L. Miller (99 patents)
• Soonam Park (77 patents)
• Toan Q. Tran (34 patents)
• Adib Khan (27 patents)
• Jang-Gyoo Yang (36 patents)
• Dmitry Lubomirsky (223 patents)
• Shankar Venkataraman (108 patents)

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