| 6198976 |
On the fly center-finding during substrate handling in a processing system |
Satish Sundar |
2001-03-06 |
| 6155773 |
Substrate clamping apparatus |
Satish Sundar |
2000-12-05 |
| 5648847 |
Method and apparatus for normalizing a laser beam to a reflective surface |
— |
1997-07-15 |
| 5544275 |
Electrically heated fluid carrying conduit having integrated heating elements and electrical conductors |
Peter G. Panagas |
1996-08-06 |
| 5537508 |
Method and dry vapor generator channel assembly for conveying a liquid from a liquid source to a liquid vaporizer with minimal liquid stagnation |
Kien N. Chuc |
1996-07-16 |
| 5465746 |
Pneumatic circuit to provide different opening and closing speeds for a pneumatic operator |
— |
1995-11-14 |
| 5337144 |
Etch rate monitor using collimated light and method of using same |
Bruno Strul, Richard de Geus |
1994-08-09 |
| 5263518 |
Method and apparatus for reducing particulate generation caused by door or cover flexing on high vacuum equipment |
— |
1993-11-23 |
| 5224581 |
Magnetic semiconductor wafers with handling apparatus and method |
Jack Ford |
1993-07-06 |
| 5219007 |
Method and apparatus for reducing particulate generation caused by door or cover flexing on high vacuum equipment |
— |
1993-06-15 |
| 5151584 |
Method and apparatus for endpoint detection in a semiconductor wafer etching system |
Manoocher Birang |
1992-09-29 |
| 5147828 |
Method of handling magnetic semiconductor wafers |
Jack Ford |
1992-09-15 |
| 5129994 |
Method and apparatus to inhibit obstruction of optical transmission through semiconductor etch process chamber viewport |
Kien N. Chuc, Jack Ford, Fred H. Hariz, Michael Sugarman |
1992-07-14 |
| 5077464 |
Method and apparatus for endpoint detection in a semiconductor wafer etching system |
Manoocher Birang |
1991-12-31 |
| 4953982 |
Method and apparatus for endpoint detection in a semiconductor wafer etching system |
Manoocher Birang |
1990-09-04 |
| 4813840 |
Method of aligning wafers and device therefor |
Rakesh Prabhakar, A. Fernando Benavides, Petru N. Nitescu |
1989-03-21 |
