Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6198976 | On the fly center-finding during substrate handling in a processing system | Satish Sundar | 2001-03-06 |
| 6155773 | Substrate clamping apparatus | Satish Sundar | 2000-12-05 |
| 5648847 | Method and apparatus for normalizing a laser beam to a reflective surface | — | 1997-07-15 |
| 5544275 | Electrically heated fluid carrying conduit having integrated heating elements and electrical conductors | Peter G. Panagas | 1996-08-06 |
| 5537508 | Method and dry vapor generator channel assembly for conveying a liquid from a liquid source to a liquid vaporizer with minimal liquid stagnation | Kien N. Chuc | 1996-07-16 |
| 5465746 | Pneumatic circuit to provide different opening and closing speeds for a pneumatic operator | — | 1995-11-14 |
| 5337144 | Etch rate monitor using collimated light and method of using same | Bruno Strul, Richard de Geus | 1994-08-09 |
| 5263518 | Method and apparatus for reducing particulate generation caused by door or cover flexing on high vacuum equipment | — | 1993-11-23 |
| 5224581 | Magnetic semiconductor wafers with handling apparatus and method | Jack Ford | 1993-07-06 |
| 5219007 | Method and apparatus for reducing particulate generation caused by door or cover flexing on high vacuum equipment | — | 1993-06-15 |
| 5151584 | Method and apparatus for endpoint detection in a semiconductor wafer etching system | Manoocher Birang | 1992-09-29 |
| 5147828 | Method of handling magnetic semiconductor wafers | Jack Ford | 1992-09-15 |
| 5129994 | Method and apparatus to inhibit obstruction of optical transmission through semiconductor etch process chamber viewport | Kien N. Chuc, Jack Ford, Fred H. Hariz, Michael Sugarman | 1992-07-14 |
| 5077464 | Method and apparatus for endpoint detection in a semiconductor wafer etching system | Manoocher Birang | 1991-12-31 |
| 4953982 | Method and apparatus for endpoint detection in a semiconductor wafer etching system | Manoocher Birang | 1990-09-04 |
| 4813840 | Method of aligning wafers and device therefor | Rakesh Prabhakar, A. Fernando Benavides, Petru N. Nitescu | 1989-03-21 |