Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7980255 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Rashid Mavleiv +4 more | 2011-07-19 |
| 7513062 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Rashid Mavliev +4 more | 2009-04-07 |
| 7507296 | Methods and apparatus for determining scrubber brush pressure | Vladimir Galburt | 2009-03-24 |
| 7497932 | Electro-chemical deposition system | Mark Cassidy Cridlin Lloyd, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more | 2009-03-03 |
| 7229504 | Methods and apparatus for determining scrubber brush pressure | Vladimir Galburt | 2007-06-12 |
| 7226514 | Spin-rinse-dryer | Anwar Husain, Brian J. Brown, David G. Andeen, Svetlana Sherman, John M. White +2 more | 2007-06-05 |
| 7063749 | Scrubber with sonic nozzle | — | 2006-06-20 |
| 6986185 | Methods and apparatus for determining scrubber brush pressure | Vladimir Galburt | 2006-01-17 |
| 6955516 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Rashid Mavliev +4 more | 2005-10-18 |
| 6921494 | Backside etching in a scrubber | Brian J. Brown, Madhavi R. Chandrachood, Radha Nayak, Fred C. Redeker, John M. White | 2005-07-26 |
| 6918864 | Roller that avoids substrate slippage | Brian J. Brown, Makoto Inagawa, Daniel Ramar, Alexander Lerner | 2005-07-19 |
| 6904637 | Scrubber with sonic nozzle | — | 2005-06-14 |
| 6820298 | Wafer scrubbing device having brush assembly and mounting assembly forming spherical joint | John M. White, Ying Yu | 2004-11-23 |
| 6797074 | Wafer edge cleaning method and apparatus | Fred C. Redeker, Brian J. Brown | 2004-09-28 |
| 6728989 | Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber | Alexander Lerner, John M. White, Shou-Sang Chang | 2004-05-04 |
| 6635157 | Electro-chemical deposition system | Yezdi Dordi, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more | 2003-10-21 |
| 6599402 | Electro-chemical deposition cell for face-up processing of single semiconductor substrates | Yezdi Dordi, Joe Stevens, Roy Edwards, Bob Lowrance, Mark Denome | 2003-07-29 |
| 6582578 | Method and associated apparatus for tilting a substrate upon entry for metal deposition | Yezdi Dordi, Joseph Stevens | 2003-06-24 |
| 6551488 | Segmenting of processing system into wet and dry areas | H. Peter W. Hey, Mark Denome | 2003-04-22 |
| 6523553 | Wafer edge cleaning method and apparatus | Fred C. Redeker, Brian J. Brown | 2003-02-25 |
| 6520315 | Gripper assembly | Boris Govzman | 2003-02-18 |
| 6516816 | Spin-rinse-dryer | Anwar Husain, Brian J. Brown, David G. Andeen, Svetlana Sherman, John M. White +2 more | 2003-02-11 |
| 6474712 | Gripper for supporting substrate in a vertical orientation | Boris Govzman, Manoocher Birang, Anwar Husain | 2002-11-05 |
| 6469283 | Method and apparatus for reducing thermal gradients within a substrate support | Vincent E. Burkhart, Steven V. Sansoni, Anthony Chih-Tung Chan | 2002-10-22 |
| 6423636 | Process sequence for improved seed layer productivity and achieving 3mm edge exclusion for a copper metalization process on semiconductor wafer | Yezdi Dordi | 2002-07-23 |