| 7980255 |
Single wafer dryer and drying methods |
Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Rashid Mavleiv +4 more |
2011-07-19 |
$13,234,000 |
| 7513062 |
Single wafer dryer and drying methods |
Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Rashid Mavliev +4 more |
2009-04-07 |
$14,489,000 |
| 7507296 |
Methods and apparatus for determining scrubber brush pressure |
Vladimir Galburt |
2009-03-24 |
$16,789,000 |
| 7497932 |
Electro-chemical deposition system |
Mark Cassidy Cridlin Lloyd, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more |
2009-03-03 |
$11,197,000 |
| 7229504 |
Methods and apparatus for determining scrubber brush pressure |
Vladimir Galburt |
2007-06-12 |
$17,998,000 |
| 7226514 |
Spin-rinse-dryer |
Anwar Husain, Brian J. Brown, David G. Andeen, Svetlana Sherman, John M. White +2 more |
2007-06-05 |
$16,579,000 |
| 7063749 |
Scrubber with sonic nozzle |
— |
2006-06-20 |
$14,811,000 |
| 6986185 |
Methods and apparatus for determining scrubber brush pressure |
Vladimir Galburt |
2006-01-17 |
$34,145,000 |
| 6955516 |
Single wafer dryer and drying methods |
Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Rashid Mavliev +4 more |
2005-10-18 |
$29,253,000 |
| 6921494 |
Backside etching in a scrubber |
Brian J. Brown, Madhavi R. Chandrachood, Radha Nayak, Fred C. Redeker, John M. White |
2005-07-26 |
$43,260,000 |
| 6918864 |
Roller that avoids substrate slippage |
Brian J. Brown, Makoto Inagawa, Daniel Ramar, Alexander Lerner |
2005-07-19 |
$46,519,000 |
| 6904637 |
Scrubber with sonic nozzle |
— |
2005-06-14 |
$12,100,000 |
| 6820298 |
Wafer scrubbing device having brush assembly and mounting assembly forming spherical joint |
John M. White, Ying Yu |
2004-11-23 |
$17,815,000 |
| 6797074 |
Wafer edge cleaning method and apparatus |
Fred C. Redeker, Brian J. Brown |
2004-09-28 |
$20,273,000 |
| 6728989 |
Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber |
Alexander Lerner, John M. White, Shou-Sang Chang |
2004-05-04 |
$25,663,000 |
| 6635157 |
Electro-chemical deposition system |
Yezdi Dordi, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more |
2003-10-21 |
$27,123,000 |
| 6599402 |
Electro-chemical deposition cell for face-up processing of single semiconductor substrates |
Yezdi Dordi, Joe Stevens, Roy Edwards, Bob Lowrance, Mark Denome |
2003-07-29 |
$37,730,000 |
| 6582578 |
Method and associated apparatus for tilting a substrate upon entry for metal deposition |
Yezdi Dordi, Joseph Stevens |
2003-06-24 |
$19,441,000 |
| 6551488 |
Segmenting of processing system into wet and dry areas |
H. Peter W. Hey, Mark Denome |
2003-04-22 |
$40,104,000 |
| 6523553 |
Wafer edge cleaning method and apparatus |
Fred C. Redeker, Brian J. Brown |
2003-02-25 |
$21,067,000 |
| 6520315 |
Gripper assembly |
Boris Govzman |
2003-02-18 |
$21,472,000 |
| 6516816 |
Spin-rinse-dryer |
Anwar Husain, Brian J. Brown, David G. Andeen, Svetlana Sherman, John M. White +2 more |
2003-02-11 |
$17,783,000 |
| 6474712 |
Gripper for supporting substrate in a vertical orientation |
Boris Govzman, Manoocher Birang, Anwar Husain |
2002-11-05 |
$31,691,000 |
| 6469283 |
Method and apparatus for reducing thermal gradients within a substrate support |
Vincent E. Burkhart, Steven V. Sansoni, Anthony Chih-Tung Chan |
2002-10-22 |
$32,970,000 |
| 6423636 |
Process sequence for improved seed layer productivity and achieving 3mm edge exclusion for a copper metalization process on semiconductor wafer |
Yezdi Dordi |
2002-07-23 |
$29,082,000 |
