Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6820298 | Wafer scrubbing device having brush assembly and mounting assembly forming spherical joint | John M. White, Michael Sugarman | 2004-11-23 |
| 6645884 | Method of forming a silicon nitride layer on a substrate | Michael Yang, Chien-Teh Kao, Karl A. Littau, Steven Chen, Henry Ho | 2003-11-11 |
| 6586343 | Method and apparatus for directing constituents through a processing chamber | Henry Ho, Steven Chen | 2003-07-01 |
| 6436192 | Apparatus for aligning a wafer | Ling Chen, Joseph Yudovsky, Lawrence Chung-Lai Lei | 2002-08-20 |
| 6063440 | Method for aligning a wafer | Ling Chen, Joseph Yudovsky, Lawrence Chung-Lai Lei | 2000-05-16 |