| 12421601 |
Rotary reactor for uniform particle coating with thin films |
Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel +2 more |
2025-09-23 |
|
| 12230530 |
Apparatus and methods for semiconductor processing |
Kaushal Gangakhedkar |
2025-02-18 |
|
| 12112969 |
Apparatus and methods for wafer chucking on a susceptor for ALD |
Kaushal Gangakhedkar |
2024-10-08 |
$69,128,000 |
| 11984343 |
Apparatus and methods for semiconductor processing |
Kaushal Gangakhedkar |
2024-05-14 |
$61,768,000 |
| 11887856 |
Enhanced spatial ALD of metals through controlled precursor mixing |
Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota +1 more |
2024-01-30 |
$39,141,000 |
| 11810810 |
Contour pocket and hybrid susceptor for wafer uniformity |
Kaushal Gangakhedkar, Kallol Bera |
2023-11-07 |
$37,048,000 |
| 11798825 |
In-situ wafer rotation for carousel processing chambers |
Alexander S. Polyak |
2023-10-24 |
$34,065,000 |
| 11557501 |
Contour pocket and hybrid susceptor for wafer uniformity |
Kaushal Gangakhedkar, Kallol Bera |
2023-01-17 |
$39,427,000 |
| 11530480 |
Injector for batch processing and methods of use |
Kevin Griffin, Mandyam Sriram |
2022-12-20 |
$39,023,000 |
| 11430680 |
Position and temperature monitoring of ALD platen susceptor |
Abraham Ravid, Kevin Griffin, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich |
2022-08-30 |
$41,861,000 |
| RE48994 |
Apparatus and method for providing uniform flow of gas |
Mei Chang, Faruk Gungor, Paul F. Ma, David Chu, Chien-Teh Kao +2 more |
2022-03-29 |
|
| 11261525 |
Injector for batch processing and methods of use |
Kevin Griffin, Mandyam Sriram |
2022-03-01 |
$41,046,000 |
| 11222809 |
Patterned vacuum chuck for double-sided processing |
Visweswaren Sivaramakrishnan, Ludovic Godet, Rutger Meyer Timmerman Thijssen |
2022-01-11 |
$177,279,000 |
| 11180851 |
Rotary reactor for uniform particle coating with thin films |
Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel +2 more |
2021-11-23 |
$124,354,000 |
| 11174552 |
Rotary reactor for uniform particle coating with thin films |
Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel +2 more |
2021-11-16 |
$84,921,000 |
| 11094577 |
Apparatus and methods for wafer chucking on a susceptor for ALD |
Kaushal Gangakhedkar |
2021-08-17 |
$63,158,000 |
| 11085129 |
Device to increase deposition uniformity in spatial ALD processing chamber |
Alexander S. Polyak |
2021-08-10 |
$94,755,000 |
| 11043386 |
Enhanced spatial ALD of metals through controlled precursor mixing |
Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota +1 more |
2021-06-22 |
$66,836,000 |
| 10954596 |
Temporal atomic layer deposition process chamber |
Alexander S. Polyak |
2021-03-23 |
$48,969,000 |
| 10959294 |
High temperature heater for processing chamber |
Alexander S. Polyak, Garry K. Kwong |
2021-03-23 |
$48,969,000 |
| 10900125 |
Apparatus for susceptor temperature verification and methods of use |
Kevin Griffin |
2021-01-26 |
$35,448,000 |
| 10861736 |
Apparatus and methods for wafer rotation in carousel susceptor |
Kaushal Gangakhedkar |
2020-12-08 |
$52,028,000 |
| 10685864 |
Contour pocket and hybrid susceptor for wafer uniformity |
Kaushal Gangakhedkar, Kallol Bera |
2020-06-16 |
$36,933,000 |
| 10658223 |
Apparatus for prevention of backside deposition in a spatial ALD process chamber |
Alexander S. Polyak |
2020-05-19 |
$40,373,000 |
| 10597779 |
Susceptor position and rational apparatus and methods of use |
William T. Weaver, Robert Brent Vopat, Jason M. Schaller |
2020-03-24 |
$19,108,000 |
