Issued Patents All Time
Showing 25 most recent of 103 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421601 | Rotary reactor for uniform particle coating with thin films | Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel +2 more | 2025-09-23 |
| 12230530 | Apparatus and methods for semiconductor processing | Kaushal Gangakhedkar | 2025-02-18 |
| 12112969 | Apparatus and methods for wafer chucking on a susceptor for ALD | Kaushal Gangakhedkar | 2024-10-08 |
| 11984343 | Apparatus and methods for semiconductor processing | Kaushal Gangakhedkar | 2024-05-14 |
| 11887856 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota +1 more | 2024-01-30 |
| 11810810 | Contour pocket and hybrid susceptor for wafer uniformity | Kaushal Gangakhedkar, Kallol Bera | 2023-11-07 |
| 11798825 | In-situ wafer rotation for carousel processing chambers | Alexander S. Polyak | 2023-10-24 |
| 11557501 | Contour pocket and hybrid susceptor for wafer uniformity | Kaushal Gangakhedkar, Kallol Bera | 2023-01-17 |
| 11530480 | Injector for batch processing and methods of use | Kevin Griffin, Mandyam Sriram | 2022-12-20 |
| 11430680 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Kevin Griffin, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich | 2022-08-30 |
| RE48994 | Apparatus and method for providing uniform flow of gas | Mei Chang, Faruk Gungor, Paul F. Ma, David Chu, Chien-Teh Kao +2 more | 2022-03-29 |
| 11261525 | Injector for batch processing and methods of use | Kevin Griffin, Mandyam Sriram | 2022-03-01 |
| 11222809 | Patterned vacuum chuck for double-sided processing | Visweswaren Sivaramakrishnan, Ludovic Godet, Rutger Meyer Timmerman Thijssen | 2022-01-11 |
| 11180851 | Rotary reactor for uniform particle coating with thin films | Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel +2 more | 2021-11-23 |
| 11174552 | Rotary reactor for uniform particle coating with thin films | Colin C. Neikirk, Pravin K. Narwankar, Kaushal Gangakhedkar, Visweswaren Sivaramakrishnan, Jonathan Frankel +2 more | 2021-11-16 |
| 11094577 | Apparatus and methods for wafer chucking on a susceptor for ALD | Kaushal Gangakhedkar | 2021-08-17 |
| 11085129 | Device to increase deposition uniformity in spatial ALD processing chamber | Alexander S. Polyak | 2021-08-10 |
| 11043386 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota +1 more | 2021-06-22 |
| 10959294 | High temperature heater for processing chamber | Alexander S. Polyak, Garry K. Kwong | 2021-03-23 |
| 10954596 | Temporal atomic layer deposition process chamber | Alexander S. Polyak | 2021-03-23 |
| 10900125 | Apparatus for susceptor temperature verification and methods of use | Kevin Griffin | 2021-01-26 |
| 10861736 | Apparatus and methods for wafer rotation in carousel susceptor | Kaushal Gangakhedkar | 2020-12-08 |
| 10685864 | Contour pocket and hybrid susceptor for wafer uniformity | Kaushal Gangakhedkar, Kallol Bera | 2020-06-16 |
| 10658223 | Apparatus for prevention of backside deposition in a spatial ALD process chamber | Alexander S. Polyak | 2020-05-19 |
| 10597779 | Susceptor position and rational apparatus and methods of use | William T. Weaver, Robert Brent Vopat, Jason M. Schaller | 2020-03-24 |