Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High temperature heater for processing chamber

High temperature heater for processing chamber

US Patent 10959294 · Granted Mar 23, 2021

Estimated economic value: $48,969,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Rotary reactor for uniform particle coating with thin films2025
Apparatus and methods for semiconductor processing2025
Apparatus and methods for wafer chucking on a susceptor for ALD2024
Apparatus and methods for semiconductor processing2024
Enhanced spatial ALD of metals through controlled precursor mixing2024
Contour pocket and hybrid susceptor for wafer uniformity2023
In-situ wafer rotation for carousel processing chambers2023
In-situ wafer rotation for carousel processing chambers2023
Contour pocket and hybrid susceptor for wafer uniformity2023
Injector for batch processing and methods of use2022
Pedestal support design for precise chamber matching and process control2022
Position and temperature monitoring of ALD platen susceptor2022