| 11798825 |
In-situ wafer rotation for carousel processing chambers |
Joseph Yudovsky |
2023-10-24 |
| 11501957 |
Pedestal support design for precise chamber matching and process control |
Gopu Krishna, Sanjeev Baluja |
2022-11-15 |
| 11085129 |
Device to increase deposition uniformity in spatial ALD processing chamber |
Joseph Yudovsky |
2021-08-10 |
| 10954596 |
Temporal atomic layer deposition process chamber |
Joseph Yudovsky |
2021-03-23 |
| 10959294 |
High temperature heater for processing chamber |
Joseph Yudovsky, Garry K. Kwong |
2021-03-23 |
| 10658223 |
Apparatus for prevention of backside deposition in a spatial ALD process chamber |
Joseph Yudovsky |
2020-05-19 |
| 10494736 |
Device to increase deposition uniformity in spatial ALD processing chamber |
Joseph Yudovsky |
2019-12-03 |
| 10415137 |
Non-metallic thermal CVD/ALD Gas Injector and Purge Systems |
Joseph Yudovsky |
2019-09-17 |
| 9022715 |
Load lock chamber designs for high-throughput processing system |
James L'HEUREUX, Christopher T. Lane, Susanne Schlaefer, Juergen Henrich, Josef T. Hoog +1 more |
2015-05-05 |
| 8899408 |
Temperature actuated tensioning mechanism |
— |
2014-12-02 |
| 7774887 |
Scrubber box and methods for using the same |
Joseph Yudovsky, Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Dan Marohl +4 more |
2010-08-17 |
| 7459056 |
Pad conditioning head for CMP process |
Avi Tepman |
2008-12-02 |
| 7377002 |
Scrubber box |
Joseph Yudovsky, Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Dan Marohl +4 more |
2008-05-27 |
| 7288165 |
Pad conditioning head for CMP process |
Avi Tepman |
2007-10-30 |
| 6939210 |
Slurry delivery arm |
Avi Tepman |
2005-09-06 |
| 6080270 |
Compact microwave downstream plasma system |
M. Shams Tabrez, Dwight C. Chew, Patrick J. Stafford, Richard Crawford Riddle |
2000-06-27 |
| 5243867 |
Mechanism for feedthrough of rotary motion to a sealed chamber |
— |
1993-09-14 |
| 5207510 |
Linear ball bearing assembly |
— |
1993-05-04 |
| 5139383 |
Device for positioning objects within a sealed chamber |
Thu Huynh |
1992-08-18 |
