Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798825 | In-situ wafer rotation for carousel processing chambers | Joseph Yudovsky | 2023-10-24 |
| 11501957 | Pedestal support design for precise chamber matching and process control | Gopu Krishna, Sanjeev Baluja | 2022-11-15 |
| 11085129 | Device to increase deposition uniformity in spatial ALD processing chamber | Joseph Yudovsky | 2021-08-10 |
| 10954596 | Temporal atomic layer deposition process chamber | Joseph Yudovsky | 2021-03-23 |
| 10959294 | High temperature heater for processing chamber | Joseph Yudovsky, Garry K. Kwong | 2021-03-23 |
| 10658223 | Apparatus for prevention of backside deposition in a spatial ALD process chamber | Joseph Yudovsky | 2020-05-19 |
| 10494736 | Device to increase deposition uniformity in spatial ALD processing chamber | Joseph Yudovsky | 2019-12-03 |
| 10415137 | Non-metallic thermal CVD/ALD Gas Injector and Purge Systems | Joseph Yudovsky | 2019-09-17 |
| 9022715 | Load lock chamber designs for high-throughput processing system | James L'HEUREUX, Christopher T. Lane, Susanne Schlaefer, Juergen Henrich, Josef T. Hoog +1 more | 2015-05-05 |
| 8899408 | Temperature actuated tensioning mechanism | — | 2014-12-02 |
| 7774887 | Scrubber box and methods for using the same | Joseph Yudovsky, Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Dan Marohl +4 more | 2010-08-17 |
| 7459056 | Pad conditioning head for CMP process | Avi Tepman | 2008-12-02 |
| 7377002 | Scrubber box | Joseph Yudovsky, Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Dan Marohl +4 more | 2008-05-27 |
| 7288165 | Pad conditioning head for CMP process | Avi Tepman | 2007-10-30 |
| 6939210 | Slurry delivery arm | Avi Tepman | 2005-09-06 |
| 6080270 | Compact microwave downstream plasma system | M. Shams Tabrez, Dwight C. Chew, Patrick J. Stafford, Richard Crawford Riddle | 2000-06-27 |
| 5243867 | Mechanism for feedthrough of rotary motion to a sealed chamber | — | 1993-09-14 |
| 5207510 | Linear ball bearing assembly | — | 1993-05-04 |
| 5139383 | Device for positioning objects within a sealed chamber | Thu Huynh | 1992-08-18 |