Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9022715 | Load lock chamber designs for high-throughput processing system | Alexander S. Polyak, James L'HEUREUX, Christopher T. Lane, Juergen Henrich, Josef T. Hoog +1 more | 2015-05-05 | $12,368,000 |
| 8869967 | Dynamic load lock with cellular structure for discrete substrates | Wolfgang BUSCHBECK, Juergen Henrich, Andreas Lopp | 2014-10-28 | $11,517,000 |