Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12049691 | Temperature-controlled shield, material deposition apparatus and method for depositing a material onto a substrate | Stefan Bangert | 2024-07-30 |
| 11905589 | Material deposition apparatus having at least one heating assembly and method for pre- and/or post-heating a substrate | Stefan Bangert, Wolfgang BUSCHBECK | 2024-02-20 |
| 11732345 | Vapor deposition apparatus and method for coating a substrate in a vacuum chamber | Stefan Bangert | 2023-08-22 |
| 11718904 | Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber | Stefan Bangert, Tommaso Vercesi, Daniele GISLON, Oliver Heimel, Dieter Haas | 2023-08-08 |
| 10483465 | Methods of operating a deposition apparatus, and deposition apparatus | Jose Manuel DIEGUEZ-CAMPO, Stefan Bangert, Harald WURSTER, Dieter Haas | 2019-11-19 |
| 9005414 | Magnet arrangement for a target backing tube, target backing tube including the same, cylindrical target assembly and sputtering system | Juergen GRILLMAYER, Wolfgang Krock | 2015-04-14 |
| 8869967 | Dynamic load lock with cellular structure for discrete substrates | Wolfgang BUSCHBECK, Juergen Henrich, Susanne Schlaefer | 2014-10-28 |
| 8137510 | Coater with a large-area assembly of rotatable magnetrons | Stefan Bangert, Frank Fuchs, Ralph Lindenberg, Uwe Schussler, Tobias Stolley | 2012-03-20 |
| 7575662 | Method for operating a sputter cathode with a target | Stefan Bangert, Wolfgang BUSCHBECK, Markus Hanika, Karl-Albert KEIM, Michael König +4 more | 2009-08-18 |
| 7531071 | Magnet arrangement for a planar magnetron | Thomas DEPPISCH | 2009-05-12 |