| 12049691 |
Temperature-controlled shield, material deposition apparatus and method for depositing a material onto a substrate |
Stefan Bangert |
2024-07-30 |
| 11905589 |
Material deposition apparatus having at least one heating assembly and method for pre- and/or post-heating a substrate |
Stefan Bangert, Wolfgang BUSCHBECK |
2024-02-20 |
| 11732345 |
Vapor deposition apparatus and method for coating a substrate in a vacuum chamber |
Stefan Bangert |
2023-08-22 |
| 11718904 |
Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber |
Stefan Bangert, Tommaso Vercesi, Daniele GISLON, Oliver Heimel, Dieter Haas |
2023-08-08 |
| 10483465 |
Methods of operating a deposition apparatus, and deposition apparatus |
Jose Manuel DIEGUEZ-CAMPO, Stefan Bangert, Harald WURSTER, Dieter Haas |
2019-11-19 |
| 9005414 |
Magnet arrangement for a target backing tube, target backing tube including the same, cylindrical target assembly and sputtering system |
Juergen GRILLMAYER, Wolfgang Krock |
2015-04-14 |
| 8869967 |
Dynamic load lock with cellular structure for discrete substrates |
Wolfgang BUSCHBECK, Juergen Henrich, Susanne Schlaefer |
2014-10-28 |
| 8137510 |
Coater with a large-area assembly of rotatable magnetrons |
Stefan Bangert, Frank Fuchs, Ralph Lindenberg, Uwe Schussler, Tobias Stolley |
2012-03-20 |
| 7575662 |
Method for operating a sputter cathode with a target |
Stefan Bangert, Wolfgang BUSCHBECK, Markus Hanika, Karl-Albert KEIM, Michael König +4 more |
2009-08-18 |
| 7531071 |
Magnet arrangement for a planar magnetron |
Thomas DEPPISCH |
2009-05-12 |
