Issued Patents All Time
Showing 25 most recent of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12286703 | Evaporation apparatus, vapor deposition apparatus, and evaporation method | Wolfgang BUSCHBECK | 2025-04-29 |
| 12203164 | Material deposition apparatus, method of depositing material on a substrate, and material deposition system | Tamara HEINTZ, Suresh MANIKKOTH KOLLARATH, Ramgopal CHAKKARAVARTHY RAMASAMY | 2025-01-21 |
| 12060634 | Roller for transporting a flexible substrate, vacuum processing apparatus, and method of cooling a roller | Thomas DEPPISCH, Wolfgang BUSCHBECK | 2024-08-13 |
| 12049691 | Temperature-controlled shield, material deposition apparatus and method for depositing a material onto a substrate | Andreas Lopp | 2024-07-30 |
| 11905589 | Material deposition apparatus having at least one heating assembly and method for pre- and/or post-heating a substrate | Andreas Lopp, Wolfgang BUSCHBECK | 2024-02-20 |
| 11906087 | Flanged joint and method of fluidly connecting two components | Lukas Kremser, Andreas Sauer | 2024-02-20 |
| 11732345 | Vapor deposition apparatus and method for coating a substrate in a vacuum chamber | Andreas Lopp | 2023-08-22 |
| 11718904 | Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber | Tommaso Vercesi, Daniele GISLON, Oliver Heimel, Andreas Lopp, Dieter Haas | 2023-08-08 |
| 11713506 | Evaporator, deposition arrangement, deposition apparatus and methods of operation thereof | Stefan Keller, Uwe Schussler, Jose Manuel DIEGUEZ-CAMPO, Byung Sung Kwak | 2023-08-01 |
| 10837111 | Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier | Tommaso Vercesi, Dieter Haas, Oliver Heimel, Daniele GISLON | 2020-11-17 |
| 10546732 | Sputter deposition source, apparatus for sputter deposition and method of assembling thereof | Stefan Keller, Uwe SCHÜßLER, Dieter Haas | 2020-01-28 |
| 10483465 | Methods of operating a deposition apparatus, and deposition apparatus | Jose Manuel DIEGUEZ-CAMPO, Andreas Lopp, Harald WURSTER, Dieter Haas | 2019-11-19 |
| 10199660 | Shadow mask alignment and management system | Byung Sung Kwak, Ralf Hofmann, Michael Koenig | 2019-02-05 |
| 9905723 | Methods for plasma activation of evaporated precursors in a process chamber | Byung Sung Kwak, Kaushal K. Singh, Nety M. Krishna | 2018-02-27 |
| 9899635 | System for depositing one or more layers on a substrate supported by a carrier and method using the same | Uwe SCHÜßLER, Jose Manuel DIEGUEZ-CAMPO, Dieter Haas | 2018-02-20 |
| 9450135 | Plasma enhanced thermal evaporator | Byung Sung Kwak, Kaushal K. Singh, Nety M. Krishna | 2016-09-20 |
| 9353436 | Coating apparatus with rotation module | Michael Koenig, Uwe Schuessler, Reiner Gertmann | 2016-05-31 |
| 9350040 | Methods of and factories for thin-film battery manufacturing | Byung Sung Kwak, Dieter Haas, Omkaram Nalamasu | 2016-05-24 |
| 9325007 | Shadow mask alignment and management system | Byung Sung Kwak, Ralf Hofmann, Michael Koenig | 2016-04-26 |
| 9130238 | Methods of and hybrid factories for thin-film battery manufacturing | Byung Sung Kwak, Dieter Haas, Omkaram Nalamasu | 2015-09-08 |
| 8733277 | Mask support, mask assembly, and assembly comprising a mask support and a mask | Heike Landgraf, Uwe Schussler | 2014-05-27 |
| 8686819 | Magnetic holding device and method for holding a substrate | Uwe Schuessler, Heike Landgraf | 2014-04-01 |
| 8464419 | Methods of and factories for thin-film battery manufacturing | Byung Sung Kwak, Dieter Haas, Omkaram Nalamasu | 2013-06-18 |
| 8218224 | Laminated electrically tintable windows | Byung Sung Kwak, Dieter Haas, Nety M. Krishna, Winfried Hoffmann | 2012-07-10 |
| 8137510 | Coater with a large-area assembly of rotatable magnetrons | Frank Fuchs, Ralph Lindenberg, Andreas Lopp, Uwe Schussler, Tobias Stolley | 2012-03-20 |