| 12286703 |
Evaporation apparatus, vapor deposition apparatus, and evaporation method |
Wolfgang BUSCHBECK |
2025-04-29 |
|
| 12203164 |
Material deposition apparatus, method of depositing material on a substrate, and material deposition system |
Tamara HEINTZ, Suresh MANIKKOTH KOLLARATH, Ramgopal CHAKKARAVARTHY RAMASAMY |
2025-01-21 |
|
| 12060634 |
Roller for transporting a flexible substrate, vacuum processing apparatus, and method of cooling a roller |
Thomas DEPPISCH, Wolfgang BUSCHBECK |
2024-08-13 |
$69,975,000 |
| 12049691 |
Temperature-controlled shield, material deposition apparatus and method for depositing a material onto a substrate |
Andreas Lopp |
2024-07-30 |
$79,851,000 |
| 11906087 |
Flanged joint and method of fluidly connecting two components |
Lukas Kremser, Andreas Sauer |
2024-02-20 |
$66,055,000 |
| 11905589 |
Material deposition apparatus having at least one heating assembly and method for pre- and/or post-heating a substrate |
Andreas Lopp, Wolfgang BUSCHBECK |
2024-02-20 |
$66,055,000 |
| 11732345 |
Vapor deposition apparatus and method for coating a substrate in a vacuum chamber |
Andreas Lopp |
2023-08-22 |
$40,609,000 |
| 11718904 |
Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber |
Tommaso Vercesi, Daniele GISLON, Oliver Heimel, Andreas Lopp, Dieter Haas |
2023-08-08 |
$46,911,000 |
| 11713506 |
Evaporator, deposition arrangement, deposition apparatus and methods of operation thereof |
Stefan Keller, Uwe Schussler, Jose Manuel DIEGUEZ-CAMPO, Byung Sung Kwak |
2023-08-01 |
$66,604,000 |
| 10837111 |
Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier |
Tommaso Vercesi, Dieter Haas, Oliver Heimel, Daniele GISLON |
2020-11-17 |
$41,112,000 |
| 10546732 |
Sputter deposition source, apparatus for sputter deposition and method of assembling thereof |
Stefan Keller, Uwe SCHÜßLER, Dieter Haas |
2020-01-28 |
$24,189,000 |
| 10483465 |
Methods of operating a deposition apparatus, and deposition apparatus |
Jose Manuel DIEGUEZ-CAMPO, Andreas Lopp, Harald WURSTER, Dieter Haas |
2019-11-19 |
$24,323,000 |
| 10199660 |
Shadow mask alignment and management system |
Byung Sung Kwak, Ralf Hofmann, Michael Koenig |
2019-02-05 |
$20,569,000 |
| 9905723 |
Methods for plasma activation of evaporated precursors in a process chamber |
Byung Sung Kwak, Kaushal K. Singh, Nety M. Krishna |
2018-02-27 |
$32,297,000 |
| 9899635 |
System for depositing one or more layers on a substrate supported by a carrier and method using the same |
Uwe SCHÜßLER, Jose Manuel DIEGUEZ-CAMPO, Dieter Haas |
2018-02-20 |
$63,276,000 |
| 9450135 |
Plasma enhanced thermal evaporator |
Byung Sung Kwak, Kaushal K. Singh, Nety M. Krishna |
2016-09-20 |
$12,933,000 |
| 9353436 |
Coating apparatus with rotation module |
Michael Koenig, Uwe Schuessler, Reiner Gertmann |
2016-05-31 |
$8,928,000 |
| 9350040 |
Methods of and factories for thin-film battery manufacturing |
Byung Sung Kwak, Dieter Haas, Omkaram Nalamasu |
2016-05-24 |
$18,549,000 |
| 9325007 |
Shadow mask alignment and management system |
Byung Sung Kwak, Ralf Hofmann, Michael Koenig |
2016-04-26 |
$17,040,000 |
| 9130238 |
Methods of and hybrid factories for thin-film battery manufacturing |
Byung Sung Kwak, Dieter Haas, Omkaram Nalamasu |
2015-09-08 |
$6,271,000 |
| 8733277 |
Mask support, mask assembly, and assembly comprising a mask support and a mask |
Heike Landgraf, Uwe Schussler |
2014-05-27 |
$21,248,000 |
| 8686819 |
Magnetic holding device and method for holding a substrate |
Uwe Schuessler, Heike Landgraf |
2014-04-01 |
$41,394,000 |
| 8464419 |
Methods of and factories for thin-film battery manufacturing |
Byung Sung Kwak, Dieter Haas, Omkaram Nalamasu |
2013-06-18 |
$9,611,000 |
| 8218224 |
Laminated electrically tintable windows |
Byung Sung Kwak, Dieter Haas, Nety M. Krishna, Winfried Hoffmann |
2012-07-10 |
$5,553,000 |
| 8137510 |
Coater with a large-area assembly of rotatable magnetrons |
Frank Fuchs, Ralph Lindenberg, Andreas Lopp, Uwe Schussler, Tobias Stolley |
2012-03-20 |
$11,903,000 |
