Patents per Year
Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9640372 | Method and system for maintaining an edge exclusion shield | Erkan Koparal | 2017-05-02 | $24,975,000 |
| 8431493 | Replaceable substrate masking on carrier and method for processing a substrate | — | 2013-04-30 | $19,200,000 |
| 8137510 | Coater with a large-area assembly of rotatable magnetrons | Stefan Bangert, Frank Fuchs, Andreas Lopp, Uwe Schussler, Tobias Stolley | 2012-03-20 | $11,903,000 |
| 7837799 | Arrangement for transporting a flat substrate in a vacuum chamber | Stefan Bangert, Frank Fuchs, Uwe Schuessler, Tobias Stolley | 2010-11-23 | $4,531,000 |
| 7153367 | Drive mechanism for a vacuum treatment apparatus | Michael König, Uwe Schussler, Stefan Bangert | 2006-12-26 | $21,218,000 |