Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9353436 | Coating apparatus with rotation module | Michael Koenig, Stefan Bangert, Reiner Gertmann | 2016-05-31 |
| 8686819 | Magnetic holding device and method for holding a substrate | Stefan Bangert, Heike Landgraf | 2014-04-01 |
| 7837799 | Arrangement for transporting a flat substrate in a vacuum chamber | Stefan Bangert, Frank Fuchs, Ralph Lindenberg, Tobias Stolley | 2010-11-23 |